Title:
SURFACE INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2010/052891
Kind Code:
A1
Abstract:
A surface inspection device (1) includes: a stage (10) supporting a wafer (W); an illumination system (20) which applies an ultraviolet ray to the surface of the wafer (W) supported by the stage (10); a light reception system (30) for focusing the light from the surface of the wafer (W) to form an image on a predetermined imaging surface; a camera unit (34) which captures the image of the wafer (W) focused on the imaging surface by the light reception system (30); a pixel compensation drive unit (35) for performing pixel compensation; a control unit (40) which controls operations of the pixel compensation drive unit (35) and the camera unit (34) so that the camera unit (34) captures the images of a plurality of wafers (W) while performing the pixel compensation by the pixel compensation drive unit (35); and an image processing unit (45) which generates a synthesis image of the wafer (W) obtained by successively arranging the pixels in the images captured by the camera unit (34) in the order of the pixel compensation.
Inventors:
FUKAZAWA KAZUHIKO (JP)
MINATO KAZUHARU (JP)
FUJISAWA HARUHIKO (JP)
MINATO KAZUHARU (JP)
FUJISAWA HARUHIKO (JP)
Application Number:
PCT/JP2009/005833
Publication Date:
May 14, 2010
Filing Date:
November 02, 2009
Export Citation:
Assignee:
NIKON CORP (JP)
FUKAZAWA KAZUHIKO (JP)
MINATO KAZUHARU (JP)
FUJISAWA HARUHIKO (JP)
FUKAZAWA KAZUHIKO (JP)
MINATO KAZUHARU (JP)
FUJISAWA HARUHIKO (JP)
International Classes:
G01N21/956
Foreign References:
| JP2008046011A | 2008-02-28 | |||
| JPH06326930A | 1994-11-25 | |||
| JP2008275540A | 2008-11-13 | |||
| JPH01224692A | 1989-09-07 | |||
| JPS62137037A | 1987-06-19 | |||
| JP2000134548A | 2000-05-12 |
Attorney, Agent or Firm:
OHNISHI, Shogo (JP)
Shogo Onishi (JP)
Shogo Onishi (JP)
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