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Title:
SURFACE MICROMACHINED PROCESS FOR MANUFACTURING ELECTROACOUSTIC TRANSDUCERS
Document Type and Number:
WIPO Patent Application WO/2002/091796
Kind Code:
A1
Abstract:
This invention relates to a surface micromachining process for manufacturing Electro-acoustic transducers, particularly ultrasonic transducers, said transducers comprising a silicon semiconductor substrate (1), on an upper surface of which one or more membranes (18) of resilient materials are supported by a structural layer (11) of insulating materiel, rigidly connected to said semiconductor substrate (1), said resilient material having a Young\'s modulus not lower than 50 GPa, said membranes (18) being metallised, said transducers including one or more lower electrodes (23, 25), rigidly connected to said semiconductor substrate (1), the process being characterised in that said structural layer (11) includes silicon monoxide. The invention further relates to an Electro-acoustic transducer, particularly an ultrasonic transducer, characterised in that the insulating material of the structural layer (11) is silicon monoxide. The invention also relates to an intermediate product for utilisation in said process for realising Electro-acoustic transducers, particularly ultrasonic transducers.

Inventors:
Foglietti, Vittorio (Via Cineto Romano 42, Roma, IT)
Cianci, Elena (Via Cineto Romano 42, Roma, IT)
Memmi, Daniele (Via Cineto Romano 42, Roma, IT)
Caliano, Giosu� (Via Ostiense 159, Roma, IT)
Pappalardo, Massimo (Via Ostiense 159, Roma, IT)
Application Number:
PCT/IT2002/000308
Publication Date:
November 14, 2002
Filing Date:
May 09, 2002
Export Citation:
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Assignee:
Consiglio, Nazionale Delle Ricerche (P.le Aldo Moro 7, Roma, IT)
ESAOTE S.P.A. (Via Ruffino Aliora 32, Casale Monferrato, IT)
Universita\', Degli Studi \'ROMA Tre\' (Roma, IT)
Foglietti, Vittorio (Via Cineto Romano 42, Roma, IT)
Cianci, Elena (Via Cineto Romano 42, Roma, IT)
Memmi, Daniele (Via Cineto Romano 42, Roma, IT)
Caliano, Giosu� (Via Ostiense 159, Roma, IT)
Pappalardo, Massimo (Via Ostiense 159, Roma, IT)
International Classes:
H04R19/00
Attorney, Agent or Firm:
Scilletta, Andrea (Via Piemonte 26, Roma, IT)
Download PDF:
Claims:
WHAT IS CLAIMED IS:
1. A process for recovering hydrogen from acracking effluent, comprising:compressing a cracking effluent in at least onecompression stage;separating at least a portion of the hydrogenfrom the compressed cracking effluent prior torefrigerating said cracking effluent to separatelow-boiling components;and subsequently cooling the effluent to effectlow temperature separation of low-boiling components.
2. The process of Claim 1 wherein saidseparating of at least a portion of the hydrogen fromthe compressed cracking effluent is accomplished bypassing said cracking effluent through at least onesemi-permeable membrane.
3. The process of Claim 2 wherein at least aportion of the non-permeating effluent is recycled tosaid at least one compression stage.
4. The process of Claim 1 wherein saidcracking effluent is compressed in at least twocompression stages.
5. The process of Claim 4 wherein the effluentfrom at least the last of said at least twocompression stages is treated to separate at least aportion of the hydrogen from the compressed crackingeffluent prior to refrigerating said effluent toseparate low-boiling components.
6. The process of Claim 1 wherein saideffluent contains carbon dioxide, and at least aportion of the carbon dioxide is removed from saidcracking effluent prior to said cooling of saidcracking effluent, and a portion of said hydrogen isremoved prior to removing said at least a portion ofsaid carbon dioxide from said cracking effluent.
7. The process of Claim 1 wherein saijdeffluent contains water, and said cracking effluentis subjected to a drying step prior to said coolingof said cracking effluent, and a portion of said hydrogen is removed prior to said drying of saidcracking effluent.
8. The process of Claim 1 wherein saideffluent is compressed at a pressure of from about 1psig to about 650 psig.
9. The process of Claim 8 wherein saideflfuent is compressed at a pressure of from about 10psig to about 550 psig.
Description:
MEMBRANE SEPARATION PROCESS FOR CRACKED GASES

This invention relates to the separation of

components from a cracking effluent. More

particularly, this invention relates to the

separation of hydrogen from a cracking effluent prior

to effecting a low temperature separation of other

low boiling components.

Olefins such as ethylene, propylene, and other

higher olefins may be produced by heating saturated

hydrocarbons such as ethane, propane, or butane to

elevated temperatures at which temperatures the

saturated hydrocarbons are converted to olefins. For

example, ethane may be dehydrogenated at elevated

temperatures to produce ethylene. Similarly,

naphtha, gas oil, and other heavy hydrocarbon feeds

ay be pyrolyzed at elevated temperatures to produce olefins.

The cracking effluent produced by the heating of

a saturated hydrocarbon or naphtha or gas oil feed

contains hydrogen, carbon dioxide, steam, olefins,

light saturated hydrocarbons, heavy hydrocarbons, and

other components. The cracking effluent is sent to a

product recovery system of the olefins plant.

In the product recovery system, the cracking

effluent is compressed in one or more compression

stages to enable the partial liquefaction of the

hydrocarbon components for separation via cryogenic

distillation. Carbon dioxide, water, and heavy

hydrocarbons must be removed prior to chilling of the

cracking effluent to prevent these components from

freezing and plugging equipment. After removal of

carbon dioxide, water vapor, and heavy hydrocarbons

from the cracking effluent, the effluent is passed to

a low temperature separation system such as a

chilling train, whereby low-boiling components such

as hydrogen and methane, are separated by

refrigeration of the cracked effluent.

Various means are used in an olefins plant to

provide refrigeration. The higher refrigeration

levels (e.g, 60°F to -40°F) are provided by a

propylene refrigeration system. Lower refrigeration

levels (-50°F to -150°F) are provided by an ethylene

refrigeration system. There are generally three or

four refrigeration levels for each of these systems.

Still lower temperature levels (e.g., -160°F to

-300°F) can be provided by one or more of the

following:

1. Methane refrigeration system;

2. Joule-Thompson (isentropic) expansion of

demethanizer liquid distillate product;

3. Joule Thompson expansion of low temperature

condensates from the chilling train; or

4. Expansion of hydrogen vapor product from a

demethanizer overhead, with concurrent power

generation.

The choice of the lowest level refrigeration

scheme is dependent on several factors; eg., type of

cracking feedstock, whether the hydrogen product is

required at high pressure or will be used as fuel, etc.

Overall refrigeration requirements for an

olefins plant can be expressed in terms of the power

required for the various systems. For a plant

incorporating, for example, propylene refrigeration,

ethylene refrigeration, and a hydrogen expander, the

refrigeration power requirements would be the

propylene refrigeration system power requirement plus

the ethylene refrigeration system power requirement,

less the power recovered in the hydrogen expander.

It is an object of the present invention to

reduce the overall refrigeration requirements for the

separation of low-boiling components from the

cracking effluent.

It is an object of the present invention to

reduce the volume of cracking effluent that .is passed

to the product recovery system, thereby reducing the

size of the equipment employed in the system.

In accordance with an aspect of the present

invention, there is provided a process for recovering

hydrogen from a cracking effluent. The process

comprises compressing a cracking effluent in at least

one compression stage, and separating at least a

portion of the hydrogen from the compressed cracking

effluent prior to refrigerating the cracking effluent

to separate low-boiling components. The effluent is

then subsequently cooled to effect low temperature

separation of low-boiling components. In a preferred

embodiment, the separation of at least a portion of

the hydrogen from the cracking effluent is

accomplished by passing the cracking effluent through

at least one semi-permeable membrane. In one

embodiment, the effluent which does not permeate the

membrane is recycled to the at least one compression

stage.

The at least one semi-permeable membrane may be

contained in at least one membrane stage, which may

be in the form of a membrane separator. A membrane

separator may contain a series of alternating layers

of membranes and spacers which are wrapped around a

-β- collection pipe in a "spiral-wound" fashion. Gas

enters the separator, and the permeate will pass

through the wrapped membranes and into the collection

pipe. The permeate passes through the collection

pipe and exits the separator through an outlet.

Non-permeating gases, or residue, exits the separator

through another outlet. The membranes may be made of

polymeric materials such as cellulosic derivatives,

polysulfone, polyamides, polyaramides, and

polyimides. Alternatively, ceramic, glass, and

metallic membranes may be employed.

In another alternative, the membrane may be made

of a bundle of hollow fibers. The fibers are made of

materials such as those hereinabove described. In

such a separator, gas which enters the separator

contacts the fiber membrane. The permeate enters the

hollow fibers while the non-permeating gases, or

residue remains outside the fibers. The permeate

travels at reduced pressure inside the fibers to a

manifold which conducts the permeate to a permeate

outlet. The non-permeate, or residue, travels to a

-7- separate outlet at essentially the same pressure as

the entering feed gas.

Examples of the hereinabove described membrane

separators are further described in Spillman,

"Economics of Gas Separation Membranes," Chemical

Engineering Progress. January 1989 pgs. 41-62;

Haggin, "New Generation of Membranes Developed for

Industrial Separations," Chemical and Engineering

News. June 6, 1988, pgs. 7-16; Monsanto, "How Prism -»

Separators Work," brochure (1985); and

"MEDAL-Membrane Separation System^Du Pont/Air

Liquide."

Alternatively, the separation of hydrogen may

take place through pressure swing adsorption. In a

pressure swing adsorption system, a gas is

preferentially adsorbed over others by a molecular

siavev. The molecular sieve is a sponge-like solid

which is precisely made so that one gas will be

preferentially adsorbed over others. As an

illustrative example of pressure swing adsorption, a

feed gas is passed through a first tower containing a

molecular sieve, which removes a specific component

from the feed gas through adsorption. The

non-adsorbed gas is passed to a second tower, where

the process continues. Meanwhile, the pressure is

dropped in the first tower in order to release the

adsorbed component, thereby regenerating the

molecular sieve. This cycle is continually repeated.

Pressure swing adsorption is further described in a

brochure published by Permea, Inc. (1987).

In another embodiment, the cracking effluent is

compressed in at least two compression stages. In

yet another embodiment, the effluent from at least

the last of the at least two compression stages is

treated to separate at least a portion of the

hydrogen from the compressed cracking effluent prior

to refrigerating the effluent to separate

low-boiling components. Separation of at least a

portion of the hydrogen from the effluent from at

least the last of the at least two compression stages

may be accomplished by passing the effluent through

at least one semi-permeable membrane as hereinabove

described.

In another embodiment, at least a portion of the

carbon dioxide in the effluent is also removed before

the effluent is cooled or refrigerated to

separate lower-boiling components, and a portion of

the hydrogen is removed from the effluent prior to

the removal of the carbon dioxide.

In yet another embodiment, the effluent is

subjected to a drying step (to remove water

therefrom) before the effluent is cooled or

refrigerated to separate lower-boiling components,

and a portion of the hydrogen is removed from the

effluent prior to the drying step.

The compression of the cracking effluent is

carried out at pressures of from about 1 psig

(compressor suction, or inlet pressure) to about 650

psig (compressor discharge pressure), preferably from

about 10 psig (compressor suction) to about 550 psig

(compressor discharge). When multiple stages are

employed, the pressure of each compression stage is

usually greater than that of the previous stage.

Prior to passing of the cracked effluent to the

cooling or refrigeration step to separate

lower-boiling components, and also between

compression stages if multiple compression stages are

employed, cooling of the cracked effluent may take

place through passing of the cracking effluent

through one or more coolers, which may be operated at

temperatures of from about 70°F to about 150°F,

preferably from about 80°F to about 120°F.

Separation of at least a portion of the hydrogen

prior to low temperature separation of lighter

hydrocarbons offers numerous advantages over

conventional systems. Hydrogen, because of its

extremely low boiling point, approaches the behavior

of a non-condensable vapor in the chilling and

condensation (i.e., refrigeration) process. By

removing some of the hydrogen prior to the

refrigeration, condensation and separation of the

other components can be carried out at higher

temperatures, thereby enabling a higher average

tempβrature level of refrigerants to be used

throughout the low temperature separation, or

refrigeration system. The reduction of refrigeration

requirements and the use of a higher average

temperature level of refrigerants results in a

savings of refrigeration power requirements. To

illustrate the savings of refrigeration power

requirements, a cracking effluent was subjected to a

refrigeration in order to remove lower-boiling

components. No hydrogen was removed from the

effluent prior to the refrigeration. The effluent

was first subjected to propylene refrigeration at

levels of 55 β F, 13°F, and -40°F. Then, the effluent

was subjected to ethylene refrigeration at levels of

-70°F, -96°F, and -143 β F. Refrigeration power

requirements for each level are given in Table 1

belo .

A cracking effluent from which 202 of the

hydrogen was removed prior to refrigeration was

subjected to propylene and ethylene refrigeration at

the levels hereinabove described. Refrigeration

duty requirements for each level, as well as total

refrigeration duty requirements, are given in Table I

below.

Table I

Refrigeration Base Case 20%H~

Temperature(°F) (No H« Removal) Removed

Propylene 55 13.32 12.52

refrigeration -13 32.97 35.15

-40 14.49 13.96

Ethylene -70 15.21 12.51

refrigeration -96 10.55 9.28

-143 13.46 12.54

Total 100.00 96.02

The above table shows that, when 20% of the

hydrogen is removed from the effluent prior to the

refrigeration in order to remove lower-boiling

components, the overall refrigeration duty

requirements are reduced by 3.982. In addition, when

202 of the hydrogen is removed from the effluent, the

distribution of the duty requirements becomes

increasingly skewed toward the higher temperature

refrigerants. Thus, the refrigeration is carried out

at a higher average temperature, saving considerably

more than 4% in power requirements.

In addition, the removal of hydrogen before the

refrigeration of the cracking effluent reduces the

volume of cracked gases to be refrigerated. This

reduction in volume enables one to cool the effluent

to separate low boiling components in smaller

equipment.

When a semi-permeable membrane(s) is employed to

separate at least a portion of the hydrogen from the

cracking effluent, the semi-permeable membrane(s) may

also be used to separate at least a portion of the

carboiv dioxide and at least a portion of the .steam or

water vapor from the cracking effluent as well.

Thus, the cracking effluent may be passed through the

membrane(s) prior to passing the effluent through

conventional carbon dioxide removal and drying

systems of the product recovery operation. Thus, the

load on the carbon dioxide removal and the drying

systems may be reduced in addition to the reduction

of the load on the low temperature separation, or

refrigeration system.

The invention will now be described with respect

to the drawings, wherein:

Figure 1 is a schematic of a first embodiment of

the separation process of the present invention;

Figure 2 is a schematic of an alternative

embodiment of the separation process of the present

invention; and

Figure 3 is a schematic of another alternative

embodiment of the separation process of the present

invention.

Referring now to the drawings, a cracked gas

effluent, produced as a result of heating and

cracking of saturated hydrocarbons, preferably a

heavier saturated hydrocarbon cracking feed,.such as

naphtha or gas oil, in line 11 is fed to a first

stage compressor 12, which is operated at an outlet

pressure of from about 20 psig to about 50 psig,

preferably from about 25 psig to about 40 psig. The

cracked effluent is then withdrawn from first

compressor 12 through line 13, and passed through

interstage cooler 14, which cools the effluent to a

temperature of from about 80°F to about 120°F. The

effluent is then withdrawn from cooler 14 through

line 15, passed to knockout drum 16, line 17, and to

second stage compressor 18, which is operated at an

outlet pressure of from about 60 psig to about 100

psig. The cracking effluent then is withdrawn

through line 19, and passed to interstage cooler 20,

which cools the effluent to a temperature of from

about 80°F to about 120°F. The effluent is withdrawn

through line 21, passed to knockout drum 22,

withdrawn from knockout drum 22 through line 23, and

then passed to third stage compressor 24. Third

stage compressor 24 is operated at an outlet pressure

of from about 100 psig to about 250 psig, preferably

from about 120 psig to about 200 psig. The effluent

then is withdrawn from compressor 24 through line 25,

and is passed through interstage cooler 26, which

cools the effluent to a temperature of from about

-13- 80°F to about 120°F. the effluent is then withdrawn

through line 27, and passed through knockout drum 28

and line 29 to fourth stage compressor 30. As the

effluent is being passed through line 29, it becomes

admixed with recycle effluent from line 43.

Fourth stage compressor 30 is operated at an

outlet pressure of from about 200 psig to about 400

psig, preferably from about 250 psig to about 350

psig. The effluent then is withdrawn through line

31, passed to interstage cooler 32, which cools the

effluent to a temperature of from about 80°F to about

120°F. The effluent then is passed to line 33, and

to knockout drum 34. The effluent is withdrawn from

knockout drum 34 through line 35 and passed to carbon

dioxide removal system 36, whereby carbon dioxide is

separated from the effluent by conventional means

well known in the art.

After the carbon dioxide is separated from the

effluent, the effluent is withdrawn from separation

system 36 through line 37 and passed to fifth stage

compressor 38, which is operated at an outlet

pressure of from about 450 psig to about 650 psig,

preferably from about 500 psig to about 600 psig.

The effluent then is withdrawn through line 39 and

passed to first membrane stage 40. First membrane

stage 40 contains a semi-permeable membrane which is

constructed as hereinabove described. First membrane

stage 40 is operated at a permeate outlet pressure of

from about 100 psig to about 300 psig. Hydrogen,

along with some ethylene and other hydrocarbons,

permeates through the membrane, whereby at least a

portion of the hydrogen is separated from the

cracking effluent, and is sent through line 41 to

second membrane stage 42. Some water vapor may also

permeate the membrane in first membrane stage 40 as

well. Second membrane stage 42 is operated at a

permeate outlet pressure of from about 1 psig to

about 100 psig, preferably from about 10 psig to

about 50 psig. Hydrogen permeates through the

membrane in second membrane stage 42 and is withdrawn

through line 45, and passed to line 61, whereby the

recovered hydrogen is sent to fuel. Residual, or

non-permeating, gases are withdrawn from second

membrane stage 42 through line 43, and passed to line

29, whereby the residual gases are admixed with

"fresh" cracking effluent and recycled to fourth

stage compressor 30.

Residual gases which do not permeate through the

membrane in first membrane stage 40 are withdrawn

from first membrane stage 40 through line 47. The

effluent in line 47 is passed through cooler 48, line

49, cooler 50, line 51, cooler 52, line 53, knockout

drum 54, line 55, and enters drying system 56, which

may include one or more dryers. Drying system 56 is

operated under conditions well known to those skilled

in the art, and serves to remove water vapor from the

cracked effluent. The effluent then is withdrawn

through line 57 and passed to heavy hydrocarbon

removal zone 58. Heavy hydrocarbon removal zone 58

is a conventional heavy hydrocarbon removal system

and is operated under conditions well known to those

skilled in the art.

The effluent, from which heavy hydrocarbons have

been separated, is withdrawn from heavy hydrocarbon

removal zone 58 through line 59 and passed to low

temperature separation system 60. Low temperature

separation system serves to separate low boiling

components such as hydrogen, methane, and ethane from

the cracking effluent. The low temperature

separation system 60 may include, for example, a

chilling or refrigerating train, a hydrogen expander

to recover power, and a demethanizer. The effluent

may also be passed through low temperature separation

system 60 in such a manner that a cascade effect is

produced. Refrigeration is carried out at

temperatures of from about 70°F to about -250°F,

preferably from about 60°F to about -220°F. Because

at least a portion of the hydrogen has been separated

from the cracking effluent prior to the refrigeration

of the effluent in low temperature separation system

60 to remove low-boiling components, refrigeration

and condensation of the various low-boiling

hydrocarbons may be carried out at higher average

temperature levels than those normally employed in a

low- emperature separation system. The overall

refrigeration requirements are reduced, and a higher

average temperature level of refrigerants may be used

throughout the low temperature separation system 60.

After refrigeration of the effluent in low-

temperature separation system 60 to remove

low-boiling components, a desired olefin product

(eg. , ethylene and/or propylene) may be recovered,

and hydrogen separated from the effluent is withdrawn

through line 61 and sent to fuel.

In accordance with another embodiment, as shown

in Figure 2, a cracking effluent, as hereinabove

described, in line 111 is passed to first stage

compressor 112, withdrawn from first stage compressor

112 through line 113, passed through interstage

cooler 114, line 115, knockout drum 116, line 117,

and then passed to second stage compressor 118. The

effluent is then withdrawn from second stage

compressor 118 through line 119, passed through

interstage cooler 120, line 121, knockout drum 122,

line 123, and then passed to third stage compressor

124. Recycle residual gases from line 169 also enter

line 123 and are admixed with the cracking effluent

fed to third stage compressor 124. The cracking

effluent is then withdrawn through line 125, and

passed through interstage cooler 126, line 127,

knockout drum 128, line 129, and passed to fourth

stage compressor 130. Residual gases from line 14

are also admixed with the effluent in line 129 to be

recycled to fourth stage compressor 130 as well.

The effluent is then withdrawn from fourth

compression stage 130 through line 131 and passed to

membrane stage 162. Hydrogen, as well as carbon

dioxide and water vapor, along with ethylene and

other hydrocarbons, permeates through the membrane,

passes through line 163, and enters membrane stage

164. Hydrogen permeates the membrane of stage 164,

passes through line 165, compressor 166, line 167,

and passes to line 161, whereby the separated

hydrogen is sent to fuel. Some carbon dioxide may

permeate the membrane of stage 164 as well, and is

also sent to fuel. Residual gases (i.e.,

non-permeating gases) are withdrawn from stage 164

through line 169, and passed to line 123, whereby the

residual gases are recycled to third stage compressor

124.

The non-permeating effluent in membrane stage

162 is withdrawn through line 171, passed through

interstage cooler 132, line 173, knockout drum 134,

line 135, and passed to carbon dioxide separation

system 136. Because a portion of the carbon dioxide

has already been separated from the cracking

effluent, the load on the carbon dioxide separation

system 136 has been reduced. Upon separation of

carbon dioxide from the effluent, the effluent is

withdrawn from the carbon dioxide separation system

136 through line 137 and passed to fifth stage

compressor 138.

The effluent is then withdrawn from fifth stage

compressor 138 through line 139 and passed to

membrane stage 140. Hydrogen and water vapor, as

well as some ethylene and other hydrocarbons,

permeate the membrane in stage 140, pass through line

141, and are passed to membrane stage 142. Hydrogen

permeates through the membrane of stage 142, passes

through line 145, and is passed to line 161, whereby

the hydrogen is sent to fuel. Residual, or

non-permeating, gases are withdrawn through line 143

and passed to line 129, whereby the residual gases

are recycled to fourth stage compressor 130.

Effluent which does not permeate the membrane of

membrane stage 140 is withdrawn through line 147,

passed through cooler 148, line 149, cooler 150, line

151, cooler 152, line 153, knockout drum 154, line

155, and enters drying zone 156, whereby any

remaining water vapor or steam is removed from the

cracking effluent. The effluent is then withdrawn

from drying zone 156 through line 157 and passed to

heavy hydrocarbon separation zone 158, whereby heavy

hydrocarbons are separated from the effluent.

The effluent, upon removal of the heavy

hydrocarbons therefrom, is withdrawn from heavy

hydrocarbon separation zone 158 through line 159, and

passed to low temperature separation system 160. Low

temperature separation system 160, operated as

hereinabove described, serves to separate low boiling

components from the cracking effluent, and a desired

olefin product is subsequently recovered. Hydrogen

separated from the effluent in low temperature

separation system 160 is withdrawn through line 161

and sent to fuel.

In accordance with another embodiment, shown in

Figure 3, a cracking effluent in line 211 is passed

to first stage compressor 212, and then withdrawn

from first stage compressor 212 through line 213.

The effluent is then passed through interstage cooler

214, line 215, knockout drum 216, line 217, and then

passed to second stage compressor 218. Residual

gasses from line 281 are also passed to line 217,

whereby the effluent and the residual gases are

admixed in line 217 and passed to second stage

compressor 218. The effluent is withdrawn from

second stage compressor 218 through line 219, passed

through interstage cooler 220, line 221, knockout

drum 222, line 223, and passed to third stage

compressor 224. Residual recycle gases from line 269

are also passed to line 223 for introduction into

third stage compressor 224.

Effluent is then withdrawn from third stage

compressor 224 through line 225, and passed to

membrane stage 274. Hydrogen, carbon dioxide, water

vapor, as well as some ethylene and other

hydrocarbons permeate the membrane in stage 274 and

pass through line 275 to membrane stage 276.

Hydrogen which permeates through the membrane in

stage 276 is withdrawn through line 277, passed

through compressor 278 and line 279, and is passed to

line 261 whereby the hydrogen is sent to fuel.

Residual, or non-permeating, gases are withdrawn

through line 281, passed to line 217, and recycled to

second stage compressor 218.

Effluent which does not permeate the membrane in

stage 274 is withdrawn through line 283, passed

through interstage cooler 226, line 285, knockout

drum 228, line 229, and passed to fourth stage

compressor 230. Also entering line 229 are residual

gases from line 243 which are recycled to fourth

stage compressor 230. The effluent is then withdrawn

from fourth stage compressor 230 through line 231 and

passed to membrane stage 262. Hydrogen, carbon

dioxide, water vapor, ethylene and other hydrocarbons

permeate the membrane in stage 262, pass through line

263, and enter membrane stage 264. Hydrogen which

permeates the membrane of stage 264 is withdrawn from

stage 264 through line 265, and passes through

compressor 266, line 267, and is sent to line 279.

The hydrogen then enters line 261 whereby the

hydrogen is sent to fuel. Residual nonpermeating

gases are withdrawn from stage 264 through line 269,

whereby the residual gases are recycled to line 229

and fourth stage compressor 230.

Effluent which does not permeate membrane stage

262 is withdrawn through line 271, and passed through

interstage cooler 232, line 273, knockout drum 234,

line 235, and enters carbon dioxide separation system

236. After the remaining carbon dioxide (i.e.,

carbon dioxide not separated by membrane stages 262,

264, 274, or 276) is separated from the cracking

effluent, the effluent is withdrawn from carbon

dioxide separation system 236 through line 237 and

passed to fifth stage compressor 238. The cracking

effluent is then withdrawn from fifth stage

compressor 238 through line 239 and is passed to

membrane stage 240. Hydrogen, water vapor, and some

ethylene and other hydrocarbons permeate the membrane

in stage 240, and pass through line 241 to membrane

stage 242. Hydrogen which permeates the membrane in

stage 242 passes through line 245 and enters line

261, whereby the hydrogen is sent to fuel.

Non-permeating residual gases are withdrawn from

stage 242 through line 243, and recycled to line 229

and fourth stage compressor 230.

Effluent which does not permeate the membrane in

stage 240 is withdrawn through line 247, and passed

through cooler 248, line 249, cooler 250, line 251,

cooler 252, line 253, knockout drum 254, line 255,

and enters drying system 256, whereby water vapor is

separated, or driven off from the effluent. After

drying, the effluent is withdrawn from drying system

256 through line 257, and passed to heavy hydrocarbon

separation system 258, whereby heavy hydrocarbons are

separated from the effluent. The effluent is then

withdrawn from heavy hydrocarbon removal system 258

through line 259 and passed to low temperature

separation system 260. In low temperature separation

system 260, low-boiling components, such as any

remaining hydrogen, methane, and ethane are separated

from the effluent in order to enable the recovery of

a desired olefin product. Hydrogen which is

separated from the effluent in low temperature

removal system 260 is withdrawn through line 261 and

is sent to fuel.

Although the drawings depict five compression

stages, and membrane stages located after either the

fifth, the fourth and fifth, or the third, fourth,

and fifth compression stages, the scope of the

present invention is not intended to be limited to a

specific number of compression stages or to specific

locations of the membrane stages, or to specific

numbers of membrane stages located after each

compression stage.

For example, in one alternative, the effluent

may pass through just one membrane stage instead of

two membrane stages as shown in the drawings. In

such an alternative, the hydrogen which permeates the

membrane may be sent to fuel, and the non-permeate is

sent to the next compression stage or to the drying,

heavy hydrocarbon removal, and low temperature

separation zones. In another alternative, the

permeate from the first membrane stage may be passed

to a booster compressor (not shown) before passing

the first stage permeate to the second membrane

stage. Also contemplated is an alternative wherein

the residue from the membrane stage(s) is recycled to

a compressor which is two or more stages upstream, as

opposed to passing the residue to the compressor of

the immediately preceding compression stage.

The invention will now be described with respect

to the following example; however, the scope of the

present invention is not intended to be limited

thereby.

EXAMPLE

A compressed cracked gas effluent was fed to a

first membrane stage for separation of a portion of

the hydrogen from the cracking effluent. The feed to

the membrane stage had the following simplified

materials balance (Line 39 of Fig. 1):

The residual or non-permeating gases had a simplified material balance as follows (Line 47 of Figure 1):

The permeate from the first membrane stage had a simplified material balance as follows (Line 41 of Figure 1):

100.0

The permeate having the simplified material

balance hereinabove described, from the first

membrane stage was then passed to a second membrane

stage. The residue, or non-permeating gases from the

second membrane stages, had a simplified material

balance as follows (Line 43 of Fig. 1):

This residue is recycled to the compression system.

The permeate from the second membrane stage had a simplified material balance as follows (Line 45 of Fig. 1):

From the above example, it is shown that by

passing the cracking effluent through the two

membrane stages, approximately 20.3% of the hydrogen

is separated from the cracking effluent before the

effluent is cooled to remove low-boiling components.

Advantages of the present invention include the

reduction of the overall refrigeration requirements

as a result of the removal of at least a portion of

the hydrogen from the cracking effluent prior to

refrigeration . f the cracking effluent to remove

low-boiling components. The removal of at least some

of the hydrogen prior to chilling or refrigeration

enables condensation of the various low-boiling

hydrocarbons to take place at higher temperatures,

which enables the use of lower quantities of higher

temperature level refrigerants to be used throughout

the chilling train. The use of a higher average

refrigeration temperature and reduced refrigeration

duty requirements results in a savings in overall

refrigeration power requirements.

In addition, when the membrane stage(s) is

employed prior to passing the effluent to a

conventional carbon dioxide separation system and/or

a drying system, some carbon dioxide and water vapor

will permeate the membrane along with the hydrogen.

This separation of carbon dioxide and water vapor

reduces the load on the carbon dioxide separation and

drying systems.

Also, by removing at least a portion of the

hydrogen, carbon dioxide, and/or water vapor from the

effluent, the volume of cracked gases which are

processed in the product recovery system is reduced,

which enables one to use smaller product recovery

equipment.

When means for separating hydrogen from the

cracking effluent are located after more than one

compression stage, one may also use smaller

compression equipment.

It is to be understood that the scope of the

specific embodiments described above. Numerous

modifications of the above teachings may be made, and

within the scope of the accompanying claims, the

invention may be practiced other than as particularly

described.