Title:
SURFACE MODIFYING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/030804
Kind Code:
A1
Abstract:
[Problem] The present invention addresses the problem of reducing the supply quantity of a replacement gas by directly discharging the gas from a discharge electrode, and stabilizing plasma generation by uniformizing gas pressure distribution.
[Solution] A discharge electrode E in an electrode chamber C comprises a plurality of electrode members 8, 9. The electrode members 8, 9 are disposed facing each other by having a supporting member 4 therebetween, a gap is formed between the facing portions of the electrode members 8, 9, and by having the gap as a gas passageway 15, the gas passageway is opened in the leading end of the discharge electrode. A replacement gas having been supplied from a manifold pipe 3 is supplied to the gas passageway 15 via an orifice.
More Like This:
Inventors:
OGISO SATORU (JP)
MORISHITA TAKAO (JP)
SAKURAI YUKIHIRA (JP)
YOSHIDA JUNYA (JP)
SUGIMURA SATOSHI (JP)
MORISHITA TAKAO (JP)
SAKURAI YUKIHIRA (JP)
YOSHIDA JUNYA (JP)
SUGIMURA SATOSHI (JP)
Application Number:
PCT/JP2017/028617
Publication Date:
February 14, 2019
Filing Date:
August 07, 2017
Export Citation:
Assignee:
KASUGA DENKI INC (JP)
International Classes:
C08J7/00; B01J19/08; B29C59/14; H05H1/24
Foreign References:
| JP2004006586A | 2004-01-08 | |||
| JP2006004686A | 2006-01-05 | |||
| JP2005243600A | 2005-09-08 | |||
| JPS6351938A | 1988-03-05 | |||
| JPH0299163A | 1990-04-11 | |||
| JP6183870B1 | 2017-08-23 | |||
| JPH062830B2 | 1994-01-12 |
Other References:
See also references of EP 3666819A4
Attorney, Agent or Firm:
SHIMA Nobuyuki (JP)
Download PDF:
Previous Patent: SEPARATION DEVICE, PULVERIZATION DEVICE, AND BEVERAGE MANUFACTURING DEVICE
Next Patent: EXTRACTION METHOD AND EXTRACTION DEVICE
Next Patent: EXTRACTION METHOD AND EXTRACTION DEVICE