Title:
SURFACE OBSERVATION METHOD
Document Type and Number:
WIPO Patent Application WO/2024/075598
Kind Code:
A1
Abstract:
This surface observation method comprises a step a) and a step b). In the step a), materials including one or more kinds of solid light-emitting dye molecules are accumulated in a region, of a substrate or a structure on the substrate, having an abnormal shape. In the step b), a fluorescent image of the solid light-emitting dye molecules is acquired by applying illumination light to the region, of the substrate or the structure on the substrate, having the abnormal shape.
Inventors:
OOWADA SHIN (JP)
ASAKO RYUICHI (JP)
SHIMURA SATORU (JP)
TANAKA KAZUO (JP)
ITO SHUNICHIRO (JP)
CHUJO YOSHIKI (JP)
YUHARA KAZUHIRO (JP)
ASAKO RYUICHI (JP)
SHIMURA SATORU (JP)
TANAKA KAZUO (JP)
ITO SHUNICHIRO (JP)
CHUJO YOSHIKI (JP)
YUHARA KAZUHIRO (JP)
Application Number:
PCT/JP2023/035017
Publication Date:
April 11, 2024
Filing Date:
September 26, 2023
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
UNIV KYOTO (JP)
UNIV KYOTO (JP)
International Classes:
G03F7/004; G01N21/70; G01N21/91; G03F7/40; H01L21/027; H01L21/66
Domestic Patent References:
| WO2005078024A1 | 2005-08-25 |
Foreign References:
| US20170261313A1 | 2017-09-14 | |||
| JP2020143176A | 2020-09-10 | |||
| JPH11271233A | 1999-10-05 | |||
| JPS61182238A | 1986-08-14 |
Other References:
KAZUO TANAKA: "Design of Stimuli-responsive Solid-state Luminescent Materials Based on Flexible Boron Element-blocks", JOURNAL OF THE IMAGING SOCIETY OF JAPAN, vol. 58, no. 1, 1 January 2019 (2019-01-01), pages 81 - 92, XP093154877
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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