Title:
SURFACE PROTECTION METHOD FOR SENSOR/ACTUATOR HAVING MOVABLE STRUCTURE, AND SENSOR/ACTUATOR ASSEMBLY HAVING MOVABLE STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2020/143356
Kind Code:
A1
Abstract:
A surface protection method for a sensor or actuator (10) having a movable structure, comprising the steps: S2, forming a first protection layer (20) on the outer surface of the sensor or actuator (10) having a movable structure; and S3, forming a second protection layer (30) on the outer surface of the first protection layer (20), wherein one of the first protection layer (20) and the second protection layer (30) is a nano-scale coating, and is used for protecting against erosion of a small molecular cluster composed of 10 or less water molecules or other gas or liquid molecules, or erosion of an ion or molecule having a size less than or equal to the small molecular cluster, the other of the first protection layer (20) and the second protection layer (30) is micron-scale coating, and is used for protecting against erosion of a macromolecular cluster composed of 10 or more water molecules or other gas or liquid molecules, or erosion of an ion or molecule having a size greater than or equal to the macromolecular cluster. Also disclosed is a sensor/actuator (10) assembly having a movable structure.
Inventors:
YANG XING (CN)
YAO JIALIN (CN)
WANG BO (CN)
YAO JIALIN (CN)
WANG BO (CN)
Application Number:
PCT/CN2019/122089
Publication Date:
July 16, 2020
Filing Date:
November 29, 2019
Export Citation:
Assignee:
UNIV TSINGHUA (CN)
International Classes:
C23C28/00; C23C14/24; C23C14/34; C23C16/44; C23C16/455
Foreign References:
| CN109518185A | 2019-03-26 | |||
| CN109626319A | 2019-04-16 | |||
| CN209411765U | 2019-09-20 | |||
| CN101933174A | 2010-12-29 | |||
| CN108411279A | 2018-08-17 | |||
| KR101486217B1 | 2015-02-06 |
Attorney, Agent or Firm:
TSINGYIHUA INTELLECTUAL PROPERTY LLC (CN)
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