Title:
SURFACE ROUGHNESS CALCULATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/075385
Kind Code:
A1
Abstract:
In the present invention, a scattered light intensity distribution acquisition unit receives scattered light from the surface of an object and obtains a first scattered light intensity distribution from the result of having received the light. A surface roughness calculation unit obtains a surface roughness index pertaining to the object. The surface roughness calculation unit corrects a provisional value for the surface roughness index until the first scattered light intensity distribution and a second scattered light intensity distribution, which is obtained through calculation using the provisional value for the surface roughness index, meet a first fitting condition. The surface roughness calculation unit determines the provisional value for the surface roughness index when the first fitting condition is met as the value of the surface roughness index pertaining to the surface of the object.
Inventors:
IGARASHI YOSHITAKA (JP)
Application Number:
PCT/JP2023/028558
Publication Date:
April 11, 2024
Filing Date:
August 04, 2023
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES (JP)
International Classes:
G01B11/30; G01B11/25
Foreign References:
| JP2016128816A | 2016-07-14 | |||
| JP2022187772A | 2022-12-20 | |||
| JP2014179925A | 2014-09-25 | |||
| JP2017071476A | 2017-04-13 |
Attorney, Agent or Firm:
KITAYAMA Mikio (JP)
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