Title:
SURFACE ROUGHNESS TESTER
Document Type and Number:
WIPO Patent Application WO/2007/066659
Kind Code:
A1
Abstract:
[PROBLEMS] To provide a surface roughness tester for adequately testing a surface
of an object under test even if the surface is a curved one. [MEANS FOR SOLVING PROBLEMS]
A surface roughens tester comprises an imaging unit (20) having a line sensor
(22) to scan the surface (101) of an object to under test in a direction perpendicular
to the length direction of the line sensor (22) and thereby to allow the line sensor
(22) to output a gray-scale signal from each pixel and a processing unit (50) for
processing the gray-scale signal. The processing unit (50) has means (S2) for
acquiring a pixel gray-scale level from the gray-scale signal and gray-scale
state generating means (S7) for generating gray-scale state information Pf
representing the gray-scale state in the direction in which the line sensor (22)
scans the object surface from the gray-scale levels of all the pixels over the
object surface (101).
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Inventors:
HAYASHI YOSHINORI (JP)
MORI HIDEKI (JP)
MORI HIDEKI (JP)
Application Number:
PCT/JP2006/324264
Publication Date:
June 14, 2007
Filing Date:
December 05, 2006
Export Citation:
Assignee:
SHIBAURA MECHATRONICS CORP (JP)
HAYASHI YOSHINORI (JP)
MORI HIDEKI (JP)
HAYASHI YOSHINORI (JP)
MORI HIDEKI (JP)
International Classes:
H01L21/66; G01B11/30; G01N21/956
Foreign References:
| JP2004301847A | 2004-10-28 | |||
| JPH07270144A | 1995-10-20 | |||
| JPH11351850A | 1999-12-24 | |||
| JP2002365234A | 2002-12-18 | |||
| JPS63106546A | 1988-05-11 |
Other References:
See also references of EP 1959487A4
Attorney, Agent or Firm:
HIGUCHI, Masaki (1-4-3 Sengencho, Nishi-ku, Yokohama-sh, Kanagawa 72, JP)
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