Title:
SURFACE SHAPE DETECTION DEVICE AND METHOD
Document Type and Number:
WIPO Patent Application WO/2017/101557
Kind Code:
A1
Abstract:
A surface shape detection device for detecting the surface shape of a surface to be detected of an object to be detected, characterizes in that the surface shape detection device comprises a mechanical adjustment system, an interference detection system, and a control and data processing system; the mechanical adjustment system fixes the object to be detected, and accordingly adjusts, for different sub-apertures of the surface to be detected, the pose of the object to be detected; the interference detection system acquires, by means of the interference between a reference wave and a detection wave that is generated by the reflection of the surface to be detected, the interference fringe patterns of each of the sub-apertures; and the control and data processing system acquires, according to the interference pattern of each of the sub-apertures, the surface shape information of each of the sub-apertures, and acquires, according to the surface shape information of each of the sub-apertures, the surface information of the surface to be detected; the interference detection system comprises a deformation mirror (4), changing the shape and number of the fringes of the interference fringe pattern by means of changing the surface shape or a reflective index; and the control and data processing system comprises a deformation mirror control module (102), controlling the surface shape or the reflective index of the deformation mirror (4) according to an interference detection system model and the interference fringe pattern, until the interference fringes satisfy the detection requirement. A surface shape detection method that uses the surface shape detection device. This invention solves the problem of splicing accuracy being influenced due to a small overlapping area.
Inventors:
ZHANG MIN (CN)
WU DONGCHENG (CN)
MIAO ERLONG (CN)
SUI YONGXIN (CN)
YANG HUAIJIANG (CN)
WU DONGCHENG (CN)
MIAO ERLONG (CN)
SUI YONGXIN (CN)
YANG HUAIJIANG (CN)
Application Number:
PCT/CN2016/100862
Publication Date:
June 22, 2017
Filing Date:
September 29, 2016
Export Citation:
Assignee:
CHANGCHUN INST OF OPTICS FINE MECH AND PHYSICS CHINESE ACAD OF SCIENCE (CN)
International Classes:
G01B11/24
Foreign References:
| CN105423948A | 2016-03-23 | |||
| CN102661719A | 2012-09-12 | |||
| CN101268331A | 2008-09-17 | |||
| CN101285734A | 2008-10-15 | |||
| CN103776389A | 2014-05-07 | |||
| US20130235472A1 | 2013-09-12 |
Attorney, Agent or Firm:
CHINA SCIENCE PATENT & TRADEMARK AGENT LTD. (CN)
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