Title:
SURFACE SHAPE MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/072016
Kind Code:
A1
Abstract:
A surface shape measurement device for measuring the surface shape of an object under measurement by irradiating laser light onto a line-shaped region of the object under measurement and imaging the laser light irradiation position from a direction other than the laser light irradiation direction, wherein: the surface shape measurement device is provided with a conversion optical system for dividing the image of the laser light irradiation position into a plurality of images along the longitudinal direction of the region using a plurality of conversion optical paths comprising at least three optical paths not positioned on a common plane defined by at least two mirrors and rearranging the divided plurality of images so that the positions thereof are aligned on the same plane along a direction different from that of the longitudinal direction and an imaging unit having an imaging lens for collectively imaging the plurality of images rearranged by the conversion optical system; each of the plurality of mirrors included in the conversion optical paths is made to extend in a direction corresponding to the longitudinal direction of the image at a length corresponding to the numerical aperture of the imaging lens and the optical path distance from the laser light irradiation position to the mirror; and the plurality of mirrors are disposed so that on the optical path of each conversion optical path, there is no mirror that composes a different conversion optical path.
Inventors:
YAMADA KATSUTO (JP)
TAKAMI YOSHIO (JP)
TAKAMI YOSHIO (JP)
Application Number:
PCT/JP2013/080920
Publication Date:
May 21, 2015
Filing Date:
November 15, 2013
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
G01B11/24
Foreign References:
| JP2007240197A | 2007-09-20 | |||
| JP2012154709A | 2012-08-16 | |||
| JP2013068541A | 2013-04-18 | |||
| JPH05340725A | 1993-12-21 |
Attorney, Agent or Firm:
Kyoto International Patent Law Office (JP)
Patent business corporation Kyoto international patent firm (JP)
Patent business corporation Kyoto international patent firm (JP)
Download PDF:
Previous Patent: RECTIFYING CIRCUIT FOR HIGH-FREQUENCY POWER SUPPLY
Next Patent: VOLTAGE DETECTION DEVICE AND VOLTAGE DETECTION METHOD
Next Patent: VOLTAGE DETECTION DEVICE AND VOLTAGE DETECTION METHOD