Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
SURFACE SHAPE MEASURING APPARATUS AND SINGLE-SHAFT DRIVER FOR USE THEREIN
Document Type and Number:
WIPO Patent Application WO/2004/032313
Kind Code:
A1
Abstract:
An apparatus for measuring the surface shape of an object comprising a detecting section, a stator, i.e. a rod-like magnet having N poles and S poles arranged alternately, and a mover, i.e., an annular member having a coil member and being fitted to the stator to be movably along it, is further provided with a linear motor for moving the detecting section relatively along the surface of the object. Features of this type of linear motor, i.e. maintenance-free, no wearing part, low oscillation driving, wide speed range, high rigidity, simple structure, no backlash, and the like, can thereby be advantageously attained.

Inventors:
ISHII MASAFUMI (JP)
Application Number:
PCT/JP2003/012775
Publication Date:
April 15, 2004
Filing Date:
October 06, 2003
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TOKYO SEIMITSU CO LTD (JP)
ISHII MASAFUMI (JP)
International Classes:
G01B5/004; H02K41/03; (IPC1-7): H02K41/03; G01B7/00; G01B21/20; H02K41/02
Foreign References:
JPH0875433A1996-03-22
JPH11220866A1999-08-10
JP2001190088A2001-07-10
JP2002283174A2002-10-03
JP3063308B22000-07-12
JPH0644093Y21994-11-14
Attorney, Agent or Firm:
Matsuura, Kenzo (P.O. Box 176 Shinjuku Sumitomo Bldg. 20F, 6-1, Nishi-shinjuku 2-chom, Shinjuku-ku Tokyo, JP)
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: STARTING POWER GENERATION SYSTEM AND STARTING POWER GENERATOR

Next Patent: PROPULSION SYSTEM