Title:
SURFACE SHAPE MEASURING DEVICE AND METHOD
Document Type and Number:
WIPO Patent Application WO/2010/038418
Kind Code:
A1
Abstract:
The measuring accuracy of an object surface shape measuring device using a two-wavelength phase-shift interferometry is improved. The surface shape measuring device is provided with a low-coherence light source (101), a plurality of wavelength filters (103) with different transmission wavelengths, an angle control unit (104c), and an analysis unit (114), and prevents a calculation error in fringe order by detecting the wavelength difference between two wavelengths by the analysis unit (114) when the two-wavelength phase-shift interferometry is performed and correcting the wavelength value and phase value obtained by calculating one of the wavelengths. The actual wavelength difference is made to match the design value by controlling the angle of the wavelength filter (103). Thus, the wavelength difference between the two wavelengths is always controlled to a constant value, and the surface shape can be measured with high accuracy even if there is a wavelength variation due to temperature change or time passage.
Inventors:
OIKAZE, Hirotoshi (())
追風寛歳 (())
追風寛歳 (())
Application Number:
JP2009/004970
Publication Date:
April 08, 2010
Filing Date:
September 29, 2009
Export Citation:
Assignee:
PANASONIC CORPORATION (1006, Oaza Kadoma Kadoma-sh, Osaka 01, 〒5718501, JP)
パナソニック株式会社 (〒01 大阪府門真市大字門真１００６番地 Osaka, 〒5718501, JP)
OIKAZE, Hirotoshi (())
パナソニック株式会社 (〒01 大阪府門真市大字門真１００６番地 Osaka, 〒5718501, JP)
OIKAZE, Hirotoshi (())
International Classes:
G01B9/02; G01B11/24; G01J9/02
Attorney, Agent or Firm:
TANAKA, Mitsuo et al. (AOYAMA & PARTNERS, IMP Building 3-7, Shiromi 1-chome, Chuo-ku, Osaka-sh, Osaka 01, 〒5400001, JP)
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