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Title:
SURFACE-SHAPE MEASURING DEVICE AND SURFACE-SHAPE MEASURING PROGRAM
Document Type and Number:
WIPO Patent Application WO/2017/038875
Kind Code:
A1
Abstract:
When non-contact three-dimensional-shape measuring instruments that use probe light are used, first shape data for a measured object must be known when the operation trajectory of a measurement head is preset such that the probe light will be as perpendicular as possible when the probe light is incident on a measurement surface. A surface-shape measuring device that measures the surface shape of an object to be measured and that is provided with: a distance measuring apparatus that measures the distance to a measurement point on a surface of the object to be measured; an angle measuring apparatus that measures the slope at the measurement point on said surface; a first calculation unit that calculates basic shape data for the object to be measured on the basis of the distance measured by the distance measuring apparatus; and a second calculation unit that calculates detailed shape data for the object to be measured on the basis of the basic shape data and of the slope measured by the angle measuring apparatus.

Inventors:
MIYAWAKI TAKASHI (JP)
Application Number:
PCT/JP2016/075506
Publication Date:
March 09, 2017
Filing Date:
August 31, 2016
Export Citation:
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Assignee:
NIKON CORP (JP)
International Classes:
G01B21/20; G01B11/24; G01B11/26; G01B21/22
Foreign References:
JP2012093225A2012-05-17
JP2003161615A2003-06-06
JP2012132682A2012-07-12
JP2012220338A2012-11-12
Other References:
See also references of EP 3346231A4
Attorney, Agent or Firm:
RYUKA IP LAW FIRM (JP)
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