Title:
SURFACE SHAPE MEASURING METHOD, MISALIGNMENT AMOUNT CALCULATING METHOD, AND SURFACE SHAPE MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/033581
Kind Code:
A1
Abstract:
Provided are a surface shape measuring method, a misalignment amount calculating method and a surface shape measuring device with which it is possible to measure the diameter of a workpiece with high precision and good repeatability, and which make it possible to perform measurements with excellent versatility. This surface shape measuring method is provided with: a first acquisition step in which a detector is disposed on one side of a workpiece and first shape data are acquired, the first shape data indicating the surface shape of the workpiece when displacements in the surface of the workpiece are detected using the detector while the workpiece and the detector are caused to rotate relative to one another about a center of rotation; and a second acquisition step in which the detector is disposed on the other side of the workpiece and second shape data are acquired, the second shape data indicating the surface shape of the workpiece when displacements in the surface of the workpiece are detected using the detector while the workpiece and the detector are caused to rotate relative to one another about the center of rotation.
Inventors:
MASUTA HIKARU (JP)
Application Number:
PCT/JP2016/069917
Publication Date:
March 02, 2017
Filing Date:
July 05, 2016
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD (JP)
International Classes:
G01B5/08; G01B21/10
Foreign References:
| JP2000501505A | 2000-02-08 | |||
| JP2012058057A | 2012-03-22 | |||
| JPH1163971A | 1999-03-05 | |||
| JP2015068740A | 2015-04-13 | |||
| JP2012154942A | 2012-08-16 |
Other References:
TADAO TSUKADA ET AL.: "A Study on Evaluation of Circularity and Related Features for Eccentric Cam Shaft(2nd Report) : Measured Results and Discussion", JOURNAL OF THE JAPAN SOCIETY OF PRECISION ENGINEERING, vol. 59, no. 3, 5 March 1993 (1993-03-05), pages 417 - 422, XP055365105
See also references of EP 3315896A4
See also references of EP 3315896A4
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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