Title:
SURFACE STRESS SENSOR, HOLLOW STRUCTURAL ELEMENT, AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2019/059326
Kind Code:
A1
Abstract:
Provided are a surface stress sensor with which a deterioration in measuring accuracy can be suppressed, and a method for manufacturing the same. A surface stress sensor (1) is provided with: a membrane (22) which deflects in response to an applied surface stress; a frame member (24) which encloses the membrane (22) with a gap therebetween when seen from the thickness direction of the membrane (22); at least one pair of coupling portions (26) which are disposed in positions sandwiching the membrane (22) when seen from the thickness direction of the membrane (22) and which couple the membrane (22) to the frame member (24); a flexible resistor (50) which is provided on at least one of the coupling portions (26) and which has a resistance value that varies in accordance with the deflection invoked in the coupling portion (26); and a supporting base (10) which is connected to the frame member (24) and overlaps the frame member (24) when seen from the thickness direction of the membrane (22); wherein a gap portion (40) is provided between the membrane (22) and the supporting base (10).
Inventors:
MURAKAMI TAKANORI (JP)
MOCHIZUKI HIDENORI (JP)
HIRASHIMA DAIKI (JP)
KATO SEIICHI (JP)
KOMATSU KAZUMA (JP)
MOCHIZUKI HIDENORI (JP)
HIRASHIMA DAIKI (JP)
KATO SEIICHI (JP)
KOMATSU KAZUMA (JP)
Application Number:
PCT/JP2018/034938
Publication Date:
March 28, 2019
Filing Date:
September 20, 2018
Export Citation:
Assignee:
ASAHI CHEMICAL IND (JP)
International Classes:
G01L1/18; B81B3/00; B81C1/00; G01N5/02; H01L29/84
Foreign References:
| JP3489309B2 | 2004-01-19 | |||
| JP5743026B2 | 2015-07-01 | |||
| JP2015045657A | 2015-03-12 |
Other References:
See also references of EP 3671155A4
Attorney, Agent or Firm:
TANAKA Hidetetsu et al. (JP)
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