Title:
SURFACE STRESS SENSOR
Document Type and Number:
WIPO Patent Application WO/2011/148774
Kind Code:
A1
Abstract:
A surface stress sensor is configured so that the deflection of the free end of one plate-like member, which is caused by uniform stress, is transmitted to the other plate-like member by moving the free end of the other plate-like member. Uniform stress applied to said plate-like member is converted into stress induced by a point force in the other plate-like member, and then the induced stress concentrates on an affixed end-side narrow portion to which piezoresistance is provided. Thus, a novel structure for a piezoresistance surface stress sensor is provided, the surface stress sensor being highly sensitive to uniform stress applied to the sensor surface.
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Inventors:
YOSHIKAWA Genki (2-1 Sengen 1-chome, Tsukuba-sh, Ibaraki 47, 〒3050047, JP)
吉川 元起 (〒47 茨城県つくば市千現一丁目２番地１ 独立行政法人物質・材料研究機構内 Ibaraki, 〒3050047, JP)
Rohrer Heinrich (2-1 Sengen 1-chome, Tsukuba-sh, Ibaraki 47, 〒3050047, JP)
ローラー ハインリッヒ (〒47 茨城県つくば市千現一丁目２番地１ 独立行政法人物質・材料研究機構内 Ibaraki, 〒3050047, JP)
吉川 元起 (〒47 茨城県つくば市千現一丁目２番地１ 独立行政法人物質・材料研究機構内 Ibaraki, 〒3050047, JP)
Rohrer Heinrich (2-1 Sengen 1-chome, Tsukuba-sh, Ibaraki 47, 〒3050047, JP)
ローラー ハインリッヒ (〒47 茨城県つくば市千現一丁目２番地１ 独立行政法人物質・材料研究機構内 Ibaraki, 〒3050047, JP)
Application Number:
JP2011/060673
Publication Date:
December 01, 2011
Filing Date:
May 09, 2011
Export Citation:
Assignee:
NATIONAL INSTITUTE FOR MATERIALS SCIENCE (2-1 Sengen 1-chome, Tsukuba-shi Ibaraki, 47, 〒3050047, JP)
独立行政法人物質・材料研究機構 (〒47 茨城県つくば市千現一丁目２番地１ Ibaraki, 〒3050047, JP)
YOSHIKAWA Genki (2-1 Sengen 1-chome, Tsukuba-sh, Ibaraki 47, 〒3050047, JP)
吉川 元起 (〒47 茨城県つくば市千現一丁目２番地１ 独立行政法人物質・材料研究機構内 Ibaraki, 〒3050047, JP)
Rohrer Heinrich (2-1 Sengen 1-chome, Tsukuba-sh, Ibaraki 47, 〒3050047, JP)
独立行政法人物質・材料研究機構 (〒47 茨城県つくば市千現一丁目２番地１ Ibaraki, 〒3050047, JP)
YOSHIKAWA Genki (2-1 Sengen 1-chome, Tsukuba-sh, Ibaraki 47, 〒3050047, JP)
吉川 元起 (〒47 茨城県つくば市千現一丁目２番地１ 独立行政法人物質・材料研究機構内 Ibaraki, 〒3050047, JP)
Rohrer Heinrich (2-1 Sengen 1-chome, Tsukuba-sh, Ibaraki 47, 〒3050047, JP)
International Classes:
G01L1/18; H01L29/84
Attorney, Agent or Firm:
NISHIZAWA Toshio (Kudan-Horie Bldg. 6F, 3-14 Kudan-kita 4-chome, Chiyoda-k, Tokyo 73, 〒1020073, JP)
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Claims:
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