Title:
SURFACE TREATMENT DEVICE AND METHOD
Document Type and Number:
WIPO Patent Application WO/2021/140857
Kind Code:
A1
Abstract:
A surface treatment device (1) having: a jig (10) for holding a workpiece (W) so as to surround the peripheral edge thereof, the workpiece (W) having a first main surface (WF) and a second main surface (WB) as surfaces to be treated; a surface treatment tank (100); and a treatment liquid circulation unit (200) for allowing circulation of a treatment liquid (2) that is supplied from an upper section of the surface treatment tank and discharged from a lower section thereof. The surface treatment tank includes support parts (110, 120) that support the jig for holding the workpiece, and first and second wall parts (140, 150) that face the workpiece. The treatment liquid circulation unit includes a first circulation unit (210) that forms a first liquid flow (LF1) of the treatment liquid along a first-main-surface-side first flow path (FP1), and a second circulation unit (220) that forms a second liquid flow (LF2) of the treatment liquid along a second-main-surface-side second flow path (FP2).
Inventors:
ISHII KATSUMI (JP)
Application Number:
PCT/JP2020/046991
Publication Date:
July 15, 2021
Filing Date:
December 16, 2020
Export Citation:
Assignee:
ALMEX TECH INC (JP)
International Classes:
C25D17/00; C25D7/00; C25D17/08; C25D21/12
Foreign References:
| JPH0881799A | 1996-03-26 | |||
| JP2016108598A | 2016-06-20 | |||
| JP2009191303A | 2009-08-27 | |||
| JPH0835099A | 1996-02-06 | |||
| CN205821497U | 2016-12-21 |
Attorney, Agent or Firm:
INOUE Hajime et al. (JP)
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