Title:
SURFACE TREATMENT FACILITY
Document Type and Number:
WIPO Patent Application WO/2019/188683
Kind Code:
A1
Abstract:
Provided is a surface treatment facility in which both surfaces of a material subjected to coating are subjected to continuous film deposition by PVD as the material is conveyed in the longitudinal direction, wherein flutter of the material subjected to coating can be suppressed. This surface treatment facility: has a chamber and continuously deposits a film by PVD on both surfaces of a material subjected to coating as the material is conveyed in the longitudinal direction through the chamber; is further provided with a conveyance mechanism for conveying the material subjected to coating and a blowing mechanism for blowing film-forming gas in the longitudinal direction on both sides of the material subjected to coating present in the chamber; and has an X/Y ratio within a range of 0.4 to 3.0 where X is the film-forming gas blowing speed, where the unit of measurement is m/min, and Y is the conveyance speed of the material subjected to coating, where the unit of measurement is m/min.
Inventors:
UMADA TAKUMI (JP)
SHINGAKI YUKIHIRO (JP)
SHINGAKI YUKIHIRO (JP)
Application Number:
PCT/JP2019/011774
Publication Date:
October 03, 2019
Filing Date:
March 20, 2019
Export Citation:
Assignee:
JFE STEEL CORP (JP)
International Classes:
C23C14/54; C23C14/56
Foreign References:
| JP2016172901A | 2016-09-29 | |||
| JP2015227488A | 2015-12-17 | |||
| JP2008512565A | 2008-04-24 | |||
| JP2005500435A | 2005-01-06 | |||
| JPH01176034A | 1989-07-12 | |||
| JPS6240368A | 1987-02-21 |
Other References:
See also references of EP 3760759A4
Attorney, Agent or Firm:
ITOH Hideaki et al. (JP)
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