Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
SURFACE TREATMENT METHOD AND SURFACE TREATMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2019/124321
Kind Code:
A1
Abstract:
According to the present invention, damage to an easily oxidizable metal layer is suppressed or prevented when drying and then wet-washing the surface of a substrate on which the metal layer is formed. In a drying unit 10, a reducing gaseous fluid containing a reducing component is brought into contact with an easily oxidizable metal layer 93 on a surface of a to-be-processed substrate 90, and the reducing gaseous fluid is activated at around the time of said contact. Afterwards, the to-be-processed substrate 90 is transported to a wet-washing unit 20 and washed with a washing solution 29.

Inventors:
AIBA Hiroaki (2-2, Kamitobakamichoshi-cho, Minami-ku, Kyoto-sh, Kyoto 05, 〒6018105, JP)
HINO Mamoru (2-2, Kamitobakamichoshi-cho, Minami-ku, Kyoto-sh, Kyoto 05, 〒6018105, JP)
AKAHORI Masato (2-2, Kamitobakamichoshi-cho, Minami-ku, Kyoto-sh, Kyoto 05, 〒6018105, JP)
Application Number:
JP2018/046396
Publication Date:
June 27, 2019
Filing Date:
December 17, 2018
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SEKISUI CHEMICAL CO., LTD. (4-4 Nishitemma 2-chome, Kita-ku Osaka-sh, Osaka 65, 〒5308565, JP)
International Classes:
B08B7/00; C23G5/00; H01L21/304
Attorney, Agent or Firm:
WATANABE Noboru et al. (3rd Floor, Gobancho KU Building 10 Gobancho, Chiyoda-k, Tokyo 76, 〒1020076, JP)
Download PDF: