Title:
SURFACE-TREATMENT METHOD FOR COMPONENTS OF MECHANICAL BOOSTER PUMPS, TURBOMOLECULAR PUMPS, OR DRY PUMPS, AS WELL AS MECHANICAL BOOSTER PUMP, TURBOMOLECULAR PUMP, OR DRY PUMP TREATED WITH SAID SURFACE-TREATMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2010/116747
Kind Code:
A1
Abstract:
Provided is a surface-treatment method for components of mechanical booster pumps, turbomolecular pumps, or dry pumps, said method resulting in high resistance to corrosion and low outgassing. Also provided is a dry pump treated with said surface-treatment method. Components of mechanical booster pumps, turbomolecular pumps, or dry pumps comprise aluminum or aluminum alloy, and the surfaces of said components are immersed in an alkaline solution and treated with micro-arc oxidation.
Inventors:
ISHIGURE FUMIAKI (JP)
INAYOSHI SAKAE (JP)
MIURA TATSUYA (JP)
SATO HIROSHI (JP)
ISHIKAWA YUICHI (JP)
INAYOSHI SAKAE (JP)
MIURA TATSUYA (JP)
SATO HIROSHI (JP)
ISHIKAWA YUICHI (JP)
Application Number:
PCT/JP2010/002576
Publication Date:
October 14, 2010
Filing Date:
April 08, 2010
Export Citation:
Assignee:
ULVAC INC (JP)
ISHIGURE FUMIAKI (JP)
INAYOSHI SAKAE (JP)
MIURA TATSUYA (JP)
SATO HIROSHI (JP)
ISHIKAWA YUICHI (JP)
ISHIGURE FUMIAKI (JP)
INAYOSHI SAKAE (JP)
MIURA TATSUYA (JP)
SATO HIROSHI (JP)
ISHIKAWA YUICHI (JP)
International Classes:
C25D11/04; C25D11/06; F04C29/00; F04D19/04
Foreign References:
| JP2006528279A | 2006-12-14 | |||
| JP2003531302A | 2003-10-21 | |||
| JP2008266701A | 2008-11-06 | |||
| JP2008088506A | 2008-04-17 |
Attorney, Agent or Firm:
SHIMIZU, YOSHIHIRO (JP)
Yoshihiro Shimizu (JP)
Yoshihiro Shimizu (JP)
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