Title:
SURFACE WAVE PLASMA TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/105358
Kind Code:
A1
Abstract:
A surface wave plasma treatment device (100) which generates surface wave plasma in a treatment container (1) and performs plasma treatment comprises: a microwave output unit (30) which generates microwaves; a plurality of microwave emission units (43) which emit the generated microwaves into the treatment container (1); and a surface wave transmission line formation member (115) which is provided in the upper portion of the treatment container (1) and in which a surface wave transmission line through which a surface wave is transmitted in the treatment container (1) is formed by the microwaves emitted from the plurality of microwave emission units (43), and the surface wave transmission line formation member (115) is produced from a dielectric and covers the plurality of microwave emission units (43), and a recessed portion such as corresponds to a susceptor (11) is formed therein.
Inventors:
IKEDA TARO (JP)
Application Number:
PCT/JP2012/081263
Publication Date:
July 18, 2013
Filing Date:
December 03, 2012
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/3065; C23C16/511; H05H1/46
Domestic Patent References:
| WO2004017684A1 | 2004-02-26 | |||
| WO2008153052A1 | 2008-12-18 |
Foreign References:
| JP2008305736A | 2008-12-18 | |||
| JPH08181119A | 1996-07-12 | |||
| JPH10294199A | 1998-11-04 | |||
| JPH09171900A | 1997-06-30 | |||
| JP2007258706A | 2007-10-04 | |||
| JP2008091176A | 2008-04-17 |
Attorney, Agent or Firm:
TAKAYAMA HIROSHI (JP)
Hiroshi Takayama (JP)
Hiroshi Takayama (JP)
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Claims:
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