SUSCEPTOR AND DEPOSITION APPARATUS INCLUDING THE SAME

Title:

SUSCEPTOR AND DEPOSITION APPARATUS INCLUDING THE SAME

Document Type and Number:

WIPO Patent Application WO/2012/015259

Kind Code:

A2

Abstract:

Provided is a susceptor, which includes a sintered body and a spindle installation part. The sintered body is formed of silicon carbide and including a recess. The spindle installation part is disposed in the recess. The spindle installation part has lower hardness than that of the sintered body.

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Inventors:

KIM, Young Nam (Seoul Square, 541Namdaemunno 5-ga, Jung-gu, Seoul 100-714, KR)

Application Number:

KR2011/005577

Publication Date:

February 02, 2012

Filing Date:

July 28, 2011

Export Citation:

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Assignee:

LG INNOTEK CO., LTD. (Seoul Square, 541 Namdaemunno 5-ga, Jung-gu, Seoul 100-714, KR)
KIM, Young Nam (Seoul Square, 541Namdaemunno 5-ga, Jung-gu, Seoul 100-714, KR)

International Classes:

H01L21/683; H01L21/205

Attorney, Agent or Firm:

SEO, Kyo Jun (9th Fl. Hyun Juk Bldg, 832-41 Yeoksam-dong, Gangnam-gu, Seoul 135-080, KR)

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Claims:

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