Title:
SUSCEPTOR
Document Type and Number:
WIPO Patent Application WO/2013/105766
Kind Code:
A1
Abstract:
A susceptor includes a plurality of holes in a first area and a plurality of holes in a second area. The first and second areas overlap a location which corresponds to at least one portion of a semiconductor device to be processed. The holes in the first area are provided in a first pattern and the holes in the second area are provided in a second pattern which may be different from the second pattern. The first and second patterns may differ, for example, based on the size, arrangement, spacing, location, and/or density of the holes.
Inventors:
KANG YU JIN (KR)
KU YOUNG SU (KR)
KANG SUK JUNE (KR)
KU YOUNG SU (KR)
KANG SUK JUNE (KR)
Application Number:
PCT/KR2013/000123
Publication Date:
July 18, 2013
Filing Date:
January 08, 2013
Export Citation:
Assignee:
LG SILTRON INC (KR)
KANG YU JIN (KR)
KU YOUNG SU (KR)
KANG SUK JUNE (KR)
KANG YU JIN (KR)
KU YOUNG SU (KR)
KANG SUK JUNE (KR)
International Classes:
H01L21/683; C23C16/458; H01L21/205
Foreign References:
| KR20040061007A | 2004-07-06 | |||
| KR20110087440A | 2011-08-03 | |||
| KR20090101086A | 2009-09-24 | |||
| JP2010278196A | 2010-12-09 | |||
| KR20100127681A | 2010-12-06 |
Other References:
See also references of EP 2803080A4
Attorney, Agent or Firm:
SEO, Kyo Jun (Hyun Juk Bldg. 832-41,Yeoksam-dong,Gangnam-gu, Seoul 135-080, KR)
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