Title:
SUSCEPTOR
Document Type and Number:
WIPO Patent Application WO/2014/132948
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a susceptor with which adverse effects on the quality of a semiconductor material can be inhibited by inhibiting secondary gas reactions caused when carbon comes into contact with a secondary gas. The present invention is provided with: a secondary-gas introduction port (12) for introducing a secondary gas into an interior; a first secondary-gas passage (10) which is provided between secondary-gas discharge ports (16) for discharging the secondary gas to an exterior, and which is provided with an inner wall comprising carbon; strip grooves (15) which are provided extending in a curved manner, to a wafer-facing surface, and which have, provided therein, the secondary-gas discharge ports (16); and a protective member (11) which is provided to at least a portion of the first secondary-gas passage (10) so as to cover the inner wall of the secondary-gas passage (10), and in which a surface at a side thereof that comes into contact with the secondary gas is configured from a resistant material having a low reactivity with caustic gas.
Inventors:
NAKAYA SATOSHI (JP)
Application Number:
PCT/JP2014/054459
Publication Date:
September 04, 2014
Filing Date:
February 25, 2014
Export Citation:
Assignee:
TOYO TANSO CO (JP)
International Classes:
H01L21/205; C23C16/458; H01L21/683
Foreign References:
| JP2008522035A | 2008-06-26 | |||
| JP2004507619A | 2004-03-11 | |||
| JPH0778276B2 | 1995-08-23 | |||
| JP2007096280A | 2007-04-12 | |||
| JP2010030846A | 2010-02-12 | |||
| JPH0778276B2 | 1995-08-23 | |||
| JP2004507619A | 2004-03-11 |
Other References:
See also references of EP 2963676A4
Attorney, Agent or Firm:
KITADAI, Tetsuo et al. (JP)
Tetsuo Kitadai (JP)
Tetsuo Kitadai (JP)
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