Title:
SUSCEPTOR
Document Type and Number:
WIPO Patent Application WO/2020/071308
Kind Code:
A1
Abstract:
Provided is a susceptor that can improve the yield of semiconductor chips fabricated from a wafer, hardly causes chipping (chip), and has a long life. The susceptor has pockets (2) on which a wafer (10) is to be placed, wherein at least one of the pockets (2) has a plurality of supports (3) for supporting the wafer (10), a plurality of contact portions (4) that contacts a side surface (10a) of the wafer (10), and a plurality of non-contact portions (5) that does not contact the side surface (10a) of the wafer (10). The contact portions (4) and the non-contact portions (5) are formed alternately on an inner peripheral wall of the pocket (2), and at least two of the supports (3) are formed on a line connecting the center (O) of the pocket (2) and the non-contact portion (5) when the susceptor is viewed from above.
Inventors:
IKEJIRI TAKAHIRO (JP)
Application Number:
PCT/JP2019/038492
Publication Date:
April 09, 2020
Filing Date:
September 30, 2019
Export Citation:
Assignee:
TOYO TANSO CO (JP)
International Classes:
H01L21/683; C23C16/458; H01L21/205
Foreign References:
| JP2007251078A | 2007-09-27 | |||
| JP2014209534A | 2014-11-06 | |||
| JP2007123628A | 2007-05-17 | |||
| JP2013138224A | 2013-07-11 |
Other References:
See also references of EP 3863043A4
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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