Title:
SWITCH ELEMENT AND CIRCUIT PROVIDED WITH SWITCH ELEMENT
Document Type and Number:
WIPO Patent Application WO/2011/036808
Kind Code:
A1
Abstract:
Provided is a switch element equipped with a switching section provided on a base. The switching section comprises a support electrode which is fixed to the base, a beam which comprises a fixed portion that is fixed to the base and electrically connected to the support electrode and contains multilayer graphene converted into metal carbide, and a movable portion that is separated from the base with one end thereof connected to the fixed portion and contains multilayer graphene, a contact electrode which is fixed to the base and faces the movable portion, a floating conductive layer which is provided on the movable portion with an insulating portion interposed therebetween and stores electric charge, and a control electrode which is fixed to the base and faces the floating conductive layer. Consequently, a stable operation becomes possible.
Inventors:
FUJITA, Shinobu (Toshiba Corporation 1-1, Shibaura 1-chome, Minato-k, Tokyo 01, 〒1058001, JP)
Application Number:
JP2009/066805
Publication Date:
March 31, 2011
Filing Date:
September 28, 2009
Export Citation:
Assignee:
KABUSHIKI KAISHA TOSHIBA (1-1 Shibaura 1-chome, Minato-ku Tokyo, 01, 〒1058001, JP)
株式会社 東芝 (〒01 東京都港区芝浦一丁目1番1号 Tokyo, 〒1058001, JP)
株式会社 東芝 (〒01 東京都港区芝浦一丁目1番1号 Tokyo, 〒1058001, JP)
International Classes:
H01H59/00; B81B3/00
Attorney, Agent or Firm:
HYUGAJI, Masahiko (Kannai ST Bldg, 4-1 Onoe-cho 1-chome, Naka-ku, Yokohama-sh, Kanagawa 15, 〒2310015, JP)
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