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Title:
SWITCHING ELEMENT AND METHOD FOR MANUFACTURING SWITCHING ELEMENT
Document Type and Number:
WIPO Patent Application WO/2013/190988
Kind Code:
A1
Abstract:
The present invention provides a non-volatile switching element that can be applied to a programmable-logic wiring changeover switch and in which an electrochemical reaction is used. Of the two electrodes for applying a bias voltage to the variable resistance layer of the non-volatile switching element, the electrode that does not feed metal ions to the variable resistance layer when the switch is in the ON state is made from a ruthenium alloy. The ruthenium alloy comprises ruthenium and a metal in which the standard Gibbs energy of formation ΔG when metal ions are generated from the metal is higher in the negative direction than ΔG of ruthenium. As a result, it becomes possible to maintain the low-resistance state in the ON state for a longer period of time without increasing the amount of electrical current required when a switch is made between the ON state and the OFF state.

Inventors:
BANNO, Naoki (7-1 Shiba 5-chome, Minato-k, Tokyo 01, 〒1088001, JP)
TADA, Munehiro (7-1 Shiba 5-chome, Minato-k, Tokyo 01, 〒1088001, JP)
SAKAMOTO, Toshitsugu (7-1 Shiba 5-chome, Minato-k, Tokyo 01, 〒1088001, JP)
Application Number:
JP2013/065376
Publication Date:
December 27, 2013
Filing Date:
June 03, 2013
Export Citation:
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Assignee:
NEC CORPORATION (7-1 Shiba 5-chome, Minato-ku Tokyo, 01, 〒1088001, JP)
International Classes:
H01L49/00; H01L21/82; H01L27/105; H01L27/28; H01L45/00; H01L51/05; H01L51/30; H01L51/40
Domestic Patent References:
WO2012023269A12012-02-23
WO2011058947A12011-05-19
WO2011115188A12011-09-22
Foreign References:
JP2010245132A2010-10-28
JP2008244397A2008-10-09
JP2011211165A2011-10-20
Attorney, Agent or Firm:
MIYAZAKI, Teruo et al. (11F Toranomon-Twin-Building West, 10-1 Toranomon 2-chome, Minato-k, Tokyo 01, 〒1050001, JP)
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