Title:
SYNTHESIS METHOD AND USE METHOD FOR CERIUM OXIDE
Document Type and Number:
WIPO Patent Application WO/2022/135608
Kind Code:
A1
Abstract:
A synthesis method for cerium oxide, comprising adding an aqueous cerium source solution to a precipitant solution to generate a raw material solution; introducing nitrogen gas into the raw material solution, and stirring the raw material solution sufficiently; filtering the raw material solution to obtain a precipitate; drying the precipitate under the protection of nitrogen gas; and firing the precipitate under the protection of nitrogen gas, so as to obtain cerium oxide. A use method for applying the cerium oxide for chemical mechanical polishing. The cerium oxide synthesized by means of the method has good CMP polishing activity.
Inventors:
YIN XIANSHENG (CN)
LIU TONGJUN (CN)
LIU TONGJUN (CN)
Application Number:
PCT/CN2021/142295
Publication Date:
June 30, 2022
Filing Date:
December 29, 2021
Export Citation:
Assignee:
ANJI MICROELECTRONICS SHANGHAI CO LTD (CN)
International Classes:
C01F17/235; C09G1/02
Foreign References:
| CN101522567A | 2009-09-02 | |||
| US20060234509A1 | 2006-10-19 | |||
| CN103043700A | 2013-04-17 | |||
| CN109761260A | 2019-05-17 | |||
| CN105800664A | 2016-07-27 |
Other References:
LIU ZHAOGANG, ET AL.: "The Preparation of Cerium Oxide Ultrafine Polishing Powder by Ammonia-Oxalic Acid Coprecipitation", PROCEEDINGS OF SYMPOSIUM ON RECENT PROGRESS IN PARTICUOLOGY—10TH NATIONAL CONFERENCE ON PARTICLE PREPARATION AND TREATMENT, 5 November 2011 (2011-11-05), pages 133 - 137, XP055946284
Attorney, Agent or Firm:
BEIJING DACHENG LAW OFFICES, LLP (CN)
Download PDF: