Title:
SYSTEM FOR DYNAMICALLY COMPENSATING POSITION ERRORS OF A SAMPLE
Document Type and Number:
WIPO Patent Application WO/2018/041744
Kind Code:
A3
Abstract:
Systems and methods are provided for dynamically compensating position errors of a sample 350. The system can comprise one or more sensing units 311,321,331 configured to generate a signal based on a position of a sample 350 and a controller. The controller can be configured to determine the position of the sample based on the signal and in response to the determined position, provide information associated with the determined position for control of one of a first handling unit in a first chamber, a second handling unit in a second chamber, and a beam location unit in the second chamber.
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Inventors:
LI FANGFU (US)
Application Number:
PCT/EP2017/071477
Publication Date:
April 12, 2018
Filing Date:
August 26, 2017
Export Citation:
Assignee:
ASML NETHERLANDS BV (NL)
HERMES MICROVISION INC (TW)
HERMES MICROVISION INC (TW)
International Classes:
H01J37/18
Foreign References:
| JPH09147778A | 1997-06-06 | |||
| JP2000323080A | 2000-11-24 | |||
| US20090196717A1 | 2009-08-06 |
Attorney, Agent or Firm:
PETERS, John (NL)
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