Title:
SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM
Document Type and Number:
WIPO Patent Application WO2005119368
Kind Code:
A3
Abstract:
A measuring system (100) for the optical measurement of an optical imaging system (150), which is provided to image a pattern arranged in an object surface (155) of the imaging system in an image surface (156) of the imaging system, comprises an object-side structure carrier (110) having an object-side measuring structure (111), to be arranged on the object side of the imaging system; an image-side structure carrier (120) having an image-side measuring structure (121), to be arranged on the image side of the imaging system; the object-side measuring structure and the image-side measuring structure being matched to each other in such a way that, when the object-side measuring structure is imaged onto the image-side measuring structure with the aid of the imaging system, a superposition pattern is produced; and a detector (130) for the locally resolving acquisition of the superposition pattern. The imaging system is designed as an immersion system for imaging with the aid of an immersion liquid (171). A structure carrier to be arranged in the region of the immersion liquid is assigned a protective system (125) in order to increase the resistance of the measuring structure to degradation caused by the immersion liquid. A measurement of immersion systems under immersion conditions is thereby possible without detrimental influence of the immersion liquid on the measuring accuracy.
Inventors:
MENGEL MARKUS (DE)
WEGMANN ULRICH (DE)
EHRMANN ALBRECHT (DE)
EMER WOLFGANG (DE)
CLEMENT REINER (DE)
MATHIJSSEN LUDO (DE)
WEGMANN ULRICH (DE)
EHRMANN ALBRECHT (DE)
EMER WOLFGANG (DE)
CLEMENT REINER (DE)
MATHIJSSEN LUDO (DE)
Application Number:
PCT/EP2005/005918
Publication Date:
May 11, 2006
Filing Date:
June 02, 2005
Export Citation:
Assignee:
ZEISS CARL SMT AG (DE)
MENGEL MARKUS (DE)
WEGMANN ULRICH (DE)
EHRMANN ALBRECHT (DE)
EMER WOLFGANG (DE)
CLEMENT REINER (DE)
MATHIJSSEN LUDO (DE)
MENGEL MARKUS (DE)
WEGMANN ULRICH (DE)
EHRMANN ALBRECHT (DE)
EMER WOLFGANG (DE)
CLEMENT REINER (DE)
MATHIJSSEN LUDO (DE)
International Classes:
G03F7/20; (IPC1-7): G03F7/20
Domestic Patent References:
| WO1999000689A2 | 1999-01-07 |
Foreign References:
| EP1420300A2 | 2004-05-19 | |||
| EP1416327A1 | 2004-05-06 | |||
| US5973773A | 1999-10-26 |
Other References:
PATENT ABSTRACTS OF JAPAN vol. 2002, no. 07 3 July 2002 (2002-07-03)
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