Title:
SYSTEM, METHOD AND COMPUTER PROGRAM FOR MANAGING SEMICONDUCTOR MANUFACTURING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2018/221198
Kind Code:
A1
Abstract:
[Problem] To enable a manager to intuitively identify each component in a semiconductor manufacturing apparatus configured from a plurality of components such as a fluid control device and the like. In addition, to provide information on the identified component to the manager so as to enable the manager to easily know the information on the identified component. [Solution] In a system in which a manager terminal 3 and an information processing device 2 are configured to be able to communicate with each other through networks NW1, NW2, the manager terminal 3 receives information on a component of a semiconductor manufacturing apparatus 1 from the information processing device 2. When a specific processing unit 32 specifies the position of a component that constitutes the semiconductor manufacturing apparatus 1 in a captured image of the semiconductor manufacturing apparatus 1, a synthesis processing unit 33 generates a synthesized image by synthesizing, with the captured image, the information on the component at the position of the specified component, and an image display unit 34 displays the synthesized image. On the other hand, the information processing device 2 extracts the information on the component by means of the extraction processing unit 21 with reference to a component information storage unit 2A, and transmits the information on the component to the manager terminal 3.
Inventors:
TANNO RYUTARO (JP)
MATSUDA TAKAHIRO (JP)
SHINOHARA TSUTOMU (JP)
MATSUDA TAKAHIRO (JP)
SHINOHARA TSUTOMU (JP)
Application Number:
PCT/JP2018/018668
Publication Date:
December 06, 2018
Filing Date:
May 15, 2018
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
G05B19/418; G05B23/02
Domestic Patent References:
| WO2014030256A1 | 2014-02-27 |
Foreign References:
| JP2014123873A | 2014-07-03 | |||
| JP2017040557A | 2017-02-23 |
Attorney, Agent or Firm:
KASUKAWA Toshio (JP)
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