SYSTEM AND METHOD FOR CONSTRAINING TOTALLY RELEASED MICROCOMPONENTS

WIPO Patent Application WO2002006152

A3

A system and method are disclosed which constrain a microcomponent that is totally released from a substrate for handling of such totally released microcomponent. A preferred embodiment provides constraining members that work to constrain a microcomponent to a substrate as such microcomponent is totally released from such substrate. Accordingly, such constraining members may aid in preserving the microcomponent with its substrate during the release of such microcomponent from its substrate during fabrication. Additionally, a preferred embodiment provides constraining members that are suitable for constraining a totally released microcomponent to a base for post-fabrication handling of the microcomponent. To further aid in post-fabrication handling of totally released microcomponents, a preferred embodiment may be implemented as a "pallet" having one or more microcomponents constrained thereto. Moreover, constraining members of a preferred embodiment enable the totally released microcomponent to be removed from such constraints when desired, but prevents the totally released microcomponent from inadvertently escaping such constraints.

ELLIS MATTHEW D
PARKER ERIC G
SKIDMORE GEORGE D

PCT/US2001/021899

July 11, 2002

July 12, 2001

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ZYVEX CORP (US)

B81B3/00; B81B7/00; (IPC1-7): B81B7/00

US5111693A	1992-05-12
EP0834759A2	1998-04-08
US5914521A	1999-06-22
US5882532A	1999-03-16

MEHREGANY M ET AL: "PRINCIPLES IN DESIGN AND MICROFABRICATION OF VARIABLE-CAPACITANCE SIDE-DRIVE MOTORS", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART A, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 8, no. 4, 1 July 1990 (1990-07-01), pages 3614 - 3624, XP000148051, ISSN: 0734-2101

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