Title:
SYSTEM AND METHOD FOR DETECTING ABNORMAL OPERATION OF PLASMA GENERATING APPARATUS BASED ON ARTIFICIAL INTELLIGENCE
Document Type and Number:
WIPO Patent Application WO/2022/154218
Kind Code:
A1
Abstract:
A system for detecting an abnormal operation of a plasma generating apparatus, according to an embodiment of the present disclosure, the system comprises: a plasma generating apparatus including one or more nozzle units configured to discharge a plasma beam; a camera module generating image data of a plasma beam discharged by the one or more nozzle units; and a control device detecting and determining whether the operation of the plasma generating apparatus is abnormal on the basis of the image data received from the camera module, and controlling the operation of the plasma generating apparatus according to a determination result of whether the operation is abnormal.
Inventors:
LEE CHANG HOON (KR)
Application Number:
PCT/KR2021/015355
Publication Date:
July 21, 2022
Filing Date:
October 28, 2021
Export Citation:
Assignee:
LEE CHANG HOON (KR)
International Classes:
H01J37/32; G06T7/00; H05H1/00
Foreign References:
| KR20110001109A | 2011-01-06 | |||
| KR20190118530A | 2019-10-18 | |||
| KR20130081149A | 2013-07-16 | |||
| US20200151239A1 | 2020-05-14 | |||
| KR20120005862A | 2012-01-17 |
Attorney, Agent or Firm:
AHN, Je Sung et al. (KR)
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