Title:
SYSTEM AND A METHOD OF MEASURING AN OPTICAL PATH DIFFERENCE IN A SENSING INTERFEROMETER
Document Type and Number:
WIPO Patent Application WO2004036164
Kind Code:
A3
Abstract:
An apparatus and a method of measuring an optical path difference in a sensing interferometer. Light from a source is directed in the sensing interferometer. The light reflected from the sensing interferometer is splitted into first and second beams respectively directed into two reference interferometers having optical path differences greater than the coherence length of the source and such that the optical signals are in quadrature. The intensities of the light transmitted by the reference interferometers and recombined light reflected from the reference interferometers are detected for measuring the optical path difference in the sensing interferometer. Additional light sources allow for correction of internal perturbations and absolute measurement of the optical path difference in the sensing interferometer.
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Inventors:
VAN NESTE RICHARD
BELLEVILLE CLAUDE
PRONOVOST DANIEL
PROULX ALAIN
BELLEVILLE CLAUDE
PRONOVOST DANIEL
PROULX ALAIN
Application Number:
PCT/CA2003/001547
Publication Date:
July 01, 2004
Filing Date:
October 07, 2003
Export Citation:
Assignee:
FISO TECHNOLOGIES INC (CA)
International Classes:
G01B9/02; (IPC1-7): G01B9/02
Foreign References:
| EP0733877A2 | 1996-09-25 | |||
| FR2765964A1 | 1999-01-15 | |||
| US5784161A | 1998-07-21 | |||
| US5721615A | 1998-02-24 |
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