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Title:
SYSTEM AND METHOD FOR MONITORING TEMPERATURE OF SUBSTRATE HEATING FURNACE
Document Type and Number:
WIPO Patent Application WO/2018/161569
Kind Code:
A1
Abstract:
A system and method for monitoring temperature of a substrate heating furnace (10). The system for monitoring temperature of the substrate heating furnace (10) comprises a temperature monitor (40). The temperature monitor (40) is provided on a fork prong (31) of a mechanical arm (30) configured to pick and place substrates (20). The temperature monitor (40) is configured to monitor the temperature of each substrate (20) which is heated by the substrate heating furnace (10) and is located on the fork prong (31). According to the system for monitoring temperature of the substrate heating furnace (10), the temperature monitor (40) can directly monitor the temperature of each substrate (20), so as to directly obtain the temperature of each substrate (20) heated by the substrate heating furnace (10), the obtained temperature of the substrate (20) is more accurate, and thus temperature monitoring accuracy of the substrates (20) can be improved.

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Inventors:
XIANG XIN (CN)
GUO ZHIGUANG (CN)
HOU BENXIANG (CN)
WANG YUNJIE (CN)
YANG FAN (CN)
Application Number:
PCT/CN2017/106367
Publication Date:
September 13, 2018
Filing Date:
October 16, 2017
Export Citation:
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Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO LTD (CN)
International Classes:
F27D21/00; G01J5/00
Foreign References:
CN106885476A2017-06-23
CN101542254A2009-09-23
CN105115604A2015-12-02
JP2007061854A2007-03-15
CN205634157U2016-10-12
CN202245325U2012-05-30
CN102784747A2012-11-21
CN106206349A2016-12-07
CN102651303A2012-08-29
Attorney, Agent or Firm:
BEIJING ZBSD PATENT&TRADEMARK AGENT LTD. (CN)
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