Title:
SYSTEM AND METHOD FOR SEARCHING FOR PATTERNS OF SEMICONDUCTOR WAFER FEATURES IN SEMICONDUCTOR WAFER DATA
Document Type and Number:
WIPO Patent Application WO2006017160
Kind Code:
A9
Abstract:
A system for searching for patterns of semiconductor wafer features for use in silicon manufacturing and device fabrication processes, the system including: a data acquisition system 00 for acquiring scan data from differing types of semiconductor wafer scanning tools such as wafer dimensional tools 10, wafer inspection tools 12, and wafer nanotopography tools 14; a buffer system 02 for providing temporary storage for scan data transmitted and for providing fault tolerance; a server system 04 for providing storage for the scan data transmitted from the buffer system 02 and converting the scan data into a format used by and stored in a database 08 management system; an analysis system 06 client station including a display and communicating with the server system 04, the analysis system 06 and the server system 04 providing scan data structuring and query operations and data transfer operations.
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Inventors:
KECK JAY (US)
KALLUS DAVID M (US)
SMITH BRYAN W (US)
VERGOW ZACHARY J (US)
KALLUS DAVID M (US)
SMITH BRYAN W (US)
VERGOW ZACHARY J (US)
Application Number:
PCT/US2005/024227
Publication Date:
November 16, 2006
Filing Date:
July 08, 2005
Export Citation:
Assignee:
ADE CORP (US)
International Classes:
G01M99/00
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