Title:
SYSTEM AND METHOD FOR ULTRAFAST AND LARGE-SIZE SCANNING
Document Type and Number:
WIPO Patent Application WO/2024/051008
Kind Code:
A1
Abstract:
A system and method for ultrafast and large-size scanning, relating to the technical field of optical microscopes, and capable of implementing automatic control of a sample stage (2) and implementing automatic, fast and large-area reliable scanning. The system comprises: the sample stage (2); a motion control assembly (1) used for implementing movement of the sample stage (2) along x, y and z axes and leveling the surface of a sample under test; a light source assembly; an objective lens; a reflector used for reflecting an optical signal emitted from the objective lens to a high-resolution camera; the high-resolution camera (7); a height sensor (8) used for monitoring the height of each position of said sample; a light intensity sensor used for monitoring light intensity data; and a control processing unit (9) used for controlling the operation of the motion control assembly (1) to implement focusing of the objective lens on the surface of said sample, and also used for adjusting the intensity of the light source assembly in real time according to the light intensity data so as to ensure that the contrast of a collected image is uniform.
Inventors:
HUA SIWEI (CN)
HE WEI (CN)
ZHAO XIN (CN)
ZHANG ZIHAO (CN)
QIU YUEJIN (CN)
HAO RONGSHUAI (CN)
FU ZAIXIN (CN)
ZHANG YUEXIN (CN)
HE WEI (CN)
ZHAO XIN (CN)
ZHANG ZIHAO (CN)
QIU YUEJIN (CN)
HAO RONGSHUAI (CN)
FU ZAIXIN (CN)
ZHANG YUEXIN (CN)
Application Number:
PCT/CN2022/136686
Publication Date:
March 14, 2024
Filing Date:
December 05, 2022
Export Citation:
Assignee:
NCS MICRO BEAMS BEIJING CO LTD (CN)
International Classes:
G02B21/24
Foreign References:
| CN111141713A | 2020-05-12 | |||
| CN101603911A | 2009-12-16 | |||
| CN109443241A | 2019-03-08 | |||
| CN201322684Y | 2009-10-07 | |||
| JP2004226939A | 2004-08-12 |
Attorney, Agent or Firm:
BEIJING JINZHIPUHUA INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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