Title:
SYSTEM FOR PRODUCING WASHING WATER FOR ELECTRONIC COMPONENTS, AND OPERATING METHOD FOR SYSTEM FOR PRODUCING WASHING WATER FOR ELECTRONIC COMPONENTS
Document Type and Number:
WIPO Patent Application WO/2020/039764
Kind Code:
A1
Abstract:
The present invention is a system for producing washing water for electronic components 100, comprising: a transfer line L1 that connects a raw material water supply unit and a use point; a return line L2 that branches at a branch point 8 at the downstream side of the transfer line L1, and merges at a merging point 9 at the upstream side; a functional substance adding device 2 that is connected to the transfer line L1 upstream from the merging point 9, and that adds a functional substance to raw material water supplied to the transfer line L1 to produce the washing water; a physical property measuring device 3 that is connected to the transfer line L1 downstream from the merging point 9, and that measures the physical properties of the washing water; a storage tank 4 that is provided in the return line L2, and that can store the washing water; and a control means 7 that controls the distribution channel of the washing water. In the system for producing washing water for electronic components 100, it is possible to shorten the preparation time for the washing water used at the use point (the time until the washing water is stable under set conditions) while also significantly suppressing the waste fluid amount of the produced washing water.
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Inventors:
OGAWA YUICHI (JP)
Application Number:
PCT/JP2019/026579
Publication Date:
February 27, 2020
Filing Date:
July 04, 2019
Export Citation:
Assignee:
KURITA WATER IND LTD (JP)
International Classes:
C02F1/68; H01L21/304
Domestic Patent References:
| WO2016042933A1 | 2016-03-24 |
Foreign References:
| JP2016076589A | 2016-05-12 | |||
| JP2016076588A | 2016-05-12 | |||
| JP2003136077A | 2003-05-13 |
Attorney, Agent or Firm:
HAYAKAWA Yuzi et al. (JP)
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