Title:
SYSTEM FOR TRANSFERRING SUBSTRATES IN CLEAN ROOMS
Document Type and Number:
WIPO Patent Application WO1993018543
Kind Code:
A3
Abstract:
The system uses a box (1) with a cartridge, containing the substrate. The box is hermetically sealed by a base (2), with locking mechanism. The latter has a pivot disc (25) in the base, and a rotary disc (45) in a lock gate (4). Both have interlocking elements (21a,b), locking slots (11a,b) and engagement bores (26a,b). The box is held and arrested in a frame (3), by a retention mechanism (31a,b), mechanically coupled to the rotary disc. A pivot movement of the pivot disc, to lock the box base in the box, causes the box to be released from the frame. A pivot movement causing release of the base from the box, results in a movement to lock the box in the frame.
Inventors:
GENTISCHER JOSEF (DE)
Application Number:
PCT/EP1992/002931
Publication Date:
October 28, 1993
Filing Date:
December 17, 1992
Export Citation:
Assignee:
ACR AUTOMATION IN CLEANROOM (DE)
International Classes:
B01L1/04; B65D55/12; B65G47/52; F24F3/16; H01L21/00; H01L21/02; H01L21/673; H01L21/677; (IPC1-7): H01L21/00; B65D55/12
Domestic Patent References:
WO1986000870A1 | 1986-02-13 | |||
WO1990014273A1 | 1990-11-29 |
Foreign References:
EP0340345B1 | 1993-01-27 |
Other References:
SOLID STATE TECHNOLOGY Bd. 33, Nr. 8, August 1990, WASHINGTON US Seiten S1 - S5 CLAUDE DOCHE 'WAFER CONFINEMENT FOR CONTOL OF CONTAMINATION IN MICROELECTRONICS'
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