Title:
SYSTEMS AND METHODS FOR PROVIDING A BEAM OF CHARGED PARTICLES
Document Type and Number:
WIPO Patent Application WO/2020/012247
Kind Code:
A3
Abstract:
Disclosed are systems and methods for generating a beam of charged particles, such as an ion beam. Such a system may comprise an interaction chamber configured to support a target, one or more electromagnetic radiation sources, a sensor, and at least one processor. The one or more electromagnetic radiation sources may be configured to provide a probe beam at a first energy for determining orientation data of the target and a particle-generating beam at a second energy, which is greater than the first energy, for producing a beam of charged particles. The processor may be configured to receive feedback information from the sensor and to cause a change in a relative orientation between the particle-generating beam and the target.
Inventors:
DEY INDRANUJ (IL)
PAPEER EVGENY (IL)
BESPALY ALEXANDER (IL)
TSIPSHTEIN SHAI (IL)
HEFETS YNON (IL)
SHAHAM ASSAF (IL)
PAPEER EVGENY (IL)
BESPALY ALEXANDER (IL)
TSIPSHTEIN SHAI (IL)
HEFETS YNON (IL)
SHAHAM ASSAF (IL)
Application Number:
PCT/IB2019/000841
Publication Date:
July 23, 2020
Filing Date:
July 09, 2019
Export Citation:
Assignee:
DEY INDRANUJ (IL)
PAPEER EVGENY (IL)
BESPALY ALEXANDER (IL)
TSIPSHTEIN SHAI (IL)
HEFETS YNON (IL)
SHAHAM ASSAF (IL)
PAPEER EVGENY (IL)
BESPALY ALEXANDER (IL)
TSIPSHTEIN SHAI (IL)
HEFETS YNON (IL)
SHAHAM ASSAF (IL)
International Classes:
H01J3/14; H01J27/24
Foreign References:
| US20150314137A1 | 2015-11-05 | |||
| US20130181142A1 | 2013-07-18 | |||
| US9937360B1 | 2018-04-10 |
Download PDF: