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Patent Searching and Data


Title:
TABLE APPARATUS AND TRANSFER APPARATUS
Document Type and Number:
WIPO Patent Application WO/2015/001688
Kind Code:
A1
Abstract:
A table apparatus (TA) is provided with: a first base (1) having a first reference surface parallel to a predetermined plane; a second base (2), which has a second reference surface parallel to the predetermined plane, and which is movable on the first reference surface in the direction parallel to a first axis in the predetermined plane; a first bearing member (7), which is provided on the second base, and which has a first gas supply port facing the first reference surface, said first bearing member forming a gas bearing between the first bearing member and the first reference surface by means of a gas supplied from the first gas supply port; a second bearing member (9), which is provided on the second base at a distance from the first bearing member with respect to the direction parallel to a second axis in the predetermined plane, said second axis being orthogonal to the first axis, and which has a second gas supply port facing the first reference surface, and which forms a gas bearing between the second bearing member and the first reference surface by means of a gas supplied from the second gas supply port; and a table (3) that can move, on the second reference surface, in the direction parallel to the second axis. With respect to the direction parallel to the second axis, the distance between the first bearing member and the second bearing member is longer than the dimension of a table moving range.

Inventors:
SATOU, Toshinori (1-5-50 Kugenumashinmei, Fujisawa-sh, Kanagawa 01, 〒2518501, JP)
Application Number:
JP2013/083968
Publication Date:
January 08, 2015
Filing Date:
December 18, 2013
Export Citation:
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Assignee:
NSK LTD. (6-3 Ohsaki 1-chome, Shinagawa-ku Tokyo, 60, 〒1418560, JP)
International Classes:
F16C32/06; H01L21/68
Foreign References:
JPH03245932A1991-11-01
JP3832084B22006-10-11
JP2000136824A2000-05-16
Attorney, Agent or Firm:
SAKAI, Hiroaki (Sakai International Patent Office, Kasumigaseki Building 2-5, Kasumigaseki 3-chome, Chiyoda-k, Tokyo 20, 〒1006020, JP)
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