Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
XYθ TABLE DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/093046
Kind Code:
A1
Abstract:
 In the present invention, one first driving unit (5), which moves back and forth along an X direction and applies X-direction drive power to a mobile table (2), is disposed so as to apply X-direction drive power to a Y-direction center position of one X-direction end part of the mobile table (2). Two second driving units (6, 7), which move back and forth in a Y direction perpendicular to the X direction and apply Y-direction drive power to the mobile table (2), are disposed so as to have point symmetry about the center (O) of the mobile table (2). A plurality of planar guide bearings (3) are disposed in positions such that the sum of moment forces of the respective planar guide bearings (3) is zero in a central axis line along the X direction of the mobile table (2). The moment force is a product of a frictional force occurring in the planar guide bearings (3) due to the movement of the mobile table (2) and the Y-direction distance from the planar guide bearings (3) to the first driving unit (5).

Inventors:
HIGUCHI, Hideya (5-50 Kugenumashinmei 1-chome, Fujisawa-sh, Kanagawa 01, 〒2518501, JP)
NAKAMURA, Tsuyoshi (5-50 Kugenumashinmei 1-chome, Fujisawa-sh, Kanagawa 01, 〒2518501, JP)
Application Number:
JP2014/006263
Publication Date:
June 25, 2015
Filing Date:
December 16, 2014
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
NSK LTD. (6-3 Ohsaki 1-chome, Shinagawa-ku Tokyo, 60, 〒1418560, JP)
International Classes:
G12B5/00; B23Q1/40; B23Q1/48; B23Q1/62; F16C29/00
Foreign References:
JP2009063540A2009-03-26
JPH0899243A1996-04-16
JPH09155666A1997-06-17
JP2001350278A2001-12-21
JP2004301256A2004-10-28
Other References:
See also references of EP 3070716A4
Attorney, Agent or Firm:
MORI, Tetsuya et al. (NICHIEI Patent and Trademark Attorneys, Shiroyama Trust Tower 32F 3-1, Toranomon 4-chome, Minato-k, Tokyo 32, 〒1056032, JP)
Download PDF: