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Title:
TABLE OF WAFER POLISHER, METHOD OF POLISHING WAFER, AND METHOD OF MANUFACTURING SEMICONDUCTOR WAFER
Document Type and Number:
WIPO Patent Application WO/2000/076723
Kind Code:
A1
Abstract:
A table for a wafer polisher is capable of resisting heat, thermal shocks and abrasion and suited to larger semiconductor wafers of high quality. A table (2) includes a plurality of laminates (11) consisting of silicide-base ceramic or carbide-base ceramic. The laminates (11) are united using a bonding layer (14). Fluid channels (12) are provided in the interface between the laminates (11).

Inventors:
Okuda, Yuji (Ibiden Co, Ltd. Ogaki-Kita Plant 1-1, Kitagata Ibigawa-cho Ibi-gun Gifu, 501-0695, JP)
Jimbo, Naoyuki (Ibiden Co, Ltd. Ogaki-Kita Plant 1-1, Kitagata Ibigawa-cho Ibi-gun Gifu, 501-0695, JP)
Majima, Kazutaka (Ibiden Co, Ltd. Ogaki-Kita Plant 1-1, Kitagata Ibigawa-cho Ibi-gun Gifu, 501-0695, JP)
Tsuji, Masahiro (Ibiden Co, Ltd. Ogaki-kita Plant 1-1, Kitagata Ibigawa-cho Ibi-gun Gifu, 501-0695, JP)
Takagi, Hideki (Ibiden Co, Ltd. Ogaki-Kita Plant 1-1, Kitagata Ibigawa-cho Ibi-gun Gifu, 501-0695, JP)
Ishikawa, Shigeharu (Ibiden Co, Ltd. Ogaki-Kita Plant 1-1, Kitagata Ibigawa-cho Ibi-gun Gifu, 501-0695, JP)
Yasuda, Hiroyuki (Ibiden Co, Ltd. Ogaki-Kita Plant 1-1, Kitagata Ibigawa-cho Ibi-gun Gifu, 501-0695, JP)
Application Number:
PCT/JP2000/003899
Publication Date:
December 21, 2000
Filing Date:
June 15, 2000
Export Citation:
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Assignee:
IBIDEN CO., LTD. (2-1 Kanda-cho Ogaki-shi Gifu, 503-8604, JP)
Okuda, Yuji (Ibiden Co, Ltd. Ogaki-Kita Plant 1-1, Kitagata Ibigawa-cho Ibi-gun Gifu, 501-0695, JP)
Jimbo, Naoyuki (Ibiden Co, Ltd. Ogaki-Kita Plant 1-1, Kitagata Ibigawa-cho Ibi-gun Gifu, 501-0695, JP)
Majima, Kazutaka (Ibiden Co, Ltd. Ogaki-Kita Plant 1-1, Kitagata Ibigawa-cho Ibi-gun Gifu, 501-0695, JP)
Tsuji, Masahiro (Ibiden Co, Ltd. Ogaki-kita Plant 1-1, Kitagata Ibigawa-cho Ibi-gun Gifu, 501-0695, JP)
Takagi, Hideki (Ibiden Co, Ltd. Ogaki-Kita Plant 1-1, Kitagata Ibigawa-cho Ibi-gun Gifu, 501-0695, JP)
Ishikawa, Shigeharu (Ibiden Co, Ltd. Ogaki-Kita Plant 1-1, Kitagata Ibigawa-cho Ibi-gun Gifu, 501-0695, JP)
Yasuda, Hiroyuki (Ibiden Co, Ltd. Ogaki-Kita Plant 1-1, Kitagata Ibigawa-cho Ibi-gun Gifu, 501-0695, JP)
International Classes:
B24B1/00; B24B37/015; B24B37/12; B24B37/14; B24B37/16; B24B41/047; B24B49/14; (IPC1-7): B24B37/00; B24B37/04
Foreign References:
JPH1190814A
EP0860238A2
JPH09150351A
JPH1190814A
Other References:
See also references of EP 1238755A1
Attorney, Agent or Firm:
Onda, Hironori (12-1, Ohmiya-cho 2-chome Gifu-shi Gifu, 500-8731, JP)
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