Title:
TANDEM MICROCHANNEL PLATE AND SOLID STATE ELECTRON DETECTOR
Document Type and Number:
WIPO Patent Application WO2002095381
Kind Code:
A3
Abstract:
A compact detector for secondary and backscattered electrons in a scanning electron beam system includes a microchannel plate detector and a solid state detector connected in a tandem manner. The detector offers large bandwidth and high dynamic range. The detector can be used for article inspection, lithography, metrology, and other related applications. The compactness of the detector makes it ideally suited for utilization in a miniature electron beam column, such as a microcolumn.
Inventors:
CHANG TAI-HON PHILIP
FRIEDMAN STUART L
YU MING L
FRIEDMAN STUART L
YU MING L
Application Number:
PCT/US2002/016301
Publication Date:
January 16, 2003
Filing Date:
May 21, 2002
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
International Classes:
G01N23/225; H01J37/244; (IPC1-7): H01J37/244; G01T1/29; G01N23/225
Foreign References:
| US4891829A | 1990-01-02 | |||
| EP0768700A1 | 1997-04-16 | |||
| US4958079A | 1990-09-18 | |||
| FR2597254A1 | 1987-10-16 |
Other References:
MARCONI M C ET AL: "FAST GATING OF A WINDOWLESS DUAL-MULTICHANNEL-PLATE-INTENSIFIED ARRAY DETECTOR", JOURNAL OF PHYSICS E. SCIENTIFIC INSTRUMENTS, IOP PUBLISHING, BRISTOL, GB, vol. 22, no. 10, 1 October 1989 (1989-10-01), pages 849 - 852, XP000066162, ISSN: 0022-3735
PATENT ABSTRACTS OF JAPAN vol. 013, no. 203 (P - 870) 15 May 1989 (1989-05-15)
PATENT ABSTRACTS OF JAPAN vol. 008, no. 033 (P - 254) 14 February 1984 (1984-02-14)
PATENT ABSTRACTS OF JAPAN vol. 013, no. 203 (P - 870) 15 May 1989 (1989-05-15)
PATENT ABSTRACTS OF JAPAN vol. 008, no. 033 (P - 254) 14 February 1984 (1984-02-14)
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