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Patent Searching and Data


Title:
TANDEM MICROCHANNEL PLATE AND SOLID STATE ELECTRON DETECTOR
Document Type and Number:
WIPO Patent Application WO2002095381
Kind Code:
A8
Abstract:
A compact detector for secondary and backscattered electrons in a scanning electron beam system includes a microchannel plate detector and a solid state detector connected in a tandem manner. The detector offers large bandwidth and high dynamic range. The detector can be used for article inspection, lithography, metrology, and other related applications. The compactness of the detector makes it ideally suited for utilization in a miniature electron beam column, such as a microcolumn.

Inventors:
CHANG TAI-HON PHILIP
FRIEDMAN STUART L
YU MING L
Application Number:
PCT/US2002/016301
Publication Date:
December 24, 2003
Filing Date:
May 21, 2002
Export Citation:
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Assignee:
APPLIED MATERIALS INC (US)
International Classes:
G01N23/225; H01J37/244; (IPC1-7): H01J37/244; G01T1/29; G01N23/225
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