Title:
TANTALUM COMPOUND, PREPARATION METHOD THEREFOR, AND TANTALUM-CONTAINING THIN FILM DEPOSITION COMPOSITION COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2022/114782
Kind Code:
A1
Abstract:
The present invention provides a tantalum compound, a preparation method therefor, and a tantalum-containing thin film deposition composition comprising same, the tantalum-containing thin film deposition composition comprising the tantalum compound, of the present invention, which has excellent thermal stability and high volatility, so as to prepare a good quality thin film.
Inventors:
LEE KYUNG EUN (KR)
KIM EUN HYE (KR)
PARK JOO HO (KR)
KIM CHUL KI (KR)
LIM MYUNG YONG (KR)
BAEK SUNG YOON (KR)
NA YONG HWAN (KR)
KIM EUN HYE (KR)
PARK JOO HO (KR)
KIM CHUL KI (KR)
LIM MYUNG YONG (KR)
BAEK SUNG YOON (KR)
NA YONG HWAN (KR)
Application Number:
PCT/KR2021/017417
Publication Date:
June 02, 2022
Filing Date:
November 24, 2021
Export Citation:
Assignee:
LAKE MAT CO LTD (KR)
International Classes:
C07F9/00; C23C16/18; C23C16/22
Foreign References:
| US20080038466A1 | 2008-02-14 | |||
| KR20120058762A | 2012-06-08 | |||
| KR20170073947A | 2017-06-29 |
Other References:
GALAJOV MIGUEL, GARCÍA CARLOS, GÓMEZ MANUEL, GÓMEZ-SAL PILAR: "Trialkyl imido niobium and tantalum compounds: synthesis, structural study and migratory insertion reactions", DALTON TRANSACTIONS, vol. 40, no. 12, 1 January 2011 (2011-01-01), Cambridge , pages 2797 - 2804, XP055934384, ISSN: 1477-9226, DOI: 10.1039/c0dt01449d
GÓMEZ MANUEL, HERNÁNDEZ-PRIETO CRISTINA, MARTÍN AVELINO, MENA MIGUEL, SANTAMARÍA CRISTINA: "An Effective Route to Dinuclear Niobium and Tantalum Imido Complexes", INORGANIC CHEMISTRY, vol. 56, no. 19, 2 October 2017 (2017-10-02), Easton , US , pages 11681 - 11687, XP055934386, ISSN: 0020-1669, DOI: 10.1021/acs.inorgchem.7b01652
GÓMEZ MANUEL, HERNÁNDEZ-PRIETO CRISTINA, MARTÍN AVELINO, MENA MIGUEL, SANTAMARÍA CRISTINA: "An Effective Route to Dinuclear Niobium and Tantalum Imido Complexes", INORGANIC CHEMISTRY, vol. 56, no. 19, 2 October 2017 (2017-10-02), Easton , US , pages 11681 - 11687, XP055934386, ISSN: 0020-1669, DOI: 10.1021/acs.inorgchem.7b01652
Attorney, Agent or Firm:
PLUS INTERNATIONAL IP LAW FIRM (KR)
Download PDF: