TARGET FEED APPARATUS - GIGAPHOTON INC

Title:

TARGET FEED APPARATUS

Document Type and Number:

WIPO Patent Application WO/2015/087979

Kind Code:

A1

Abstract:

　This target feed apparatus is provided with: a target generator having a nozzle in which are formed nozzle holes for outputting a liquid target substance, and containing a liquid target substance inside; and a filter arranged within the target generator and formed of glass that reacts with the liquid target substance and produces a solid reaction product. The filter has first through-holes for circulating the liquid target substance, the inside surfaces of the first through-holes being coated by a material that is nonreactive with the liquid target substance.

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Inventors:

SHIRAISHI YUTAKA (JP)
HIRASHITA TOSHIYUKI (JP)
IKESAKA SHINYA (JP)

Application Number:

PCT/JP2014/082879

Publication Date:

June 18, 2015

Filing Date:

December 11, 2014

Export Citation:

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Assignee:

GIGAPHOTON INC (JP)

International Classes:

H05G2/00

Foreign References:

US20120292527A1	2012-11-22
JP2013514966A	2013-05-02
JP2011514648A	2011-05-06
JP2013140771A	2013-07-18

Attorney, Agent or Firm:

EBISU International Patent Office (JP)
Patent business corporation エビス international patent firm (JP)

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