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Patent Searching and Data


Title:
TARGET GENERATING DEVICE AND EXTREME UV LIGHT GENERATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/042627
Kind Code:
A1
Abstract:
A target generating device according to one aspect of the invention comprises a tank for housing a target substance, a heater disposed in the tank, a nozzle communicating with the interior of the tank, a lid part having a gas introduction port communicating with the interior of the tank, and a plurality of shielding plates, disposed in the interior of the tank, for suppressing the entrance of the target substance into the gas introduction port, wherein each of the plurality of shielding plates is provided with at least one non-shielding region portion for letting the gas through. From among the plurality of shielding plates, at least two arbitrary shielding plates have their respective non-shielding region portions positioned in such a manner that it is not possible to see beyond one shielding plate from the other shielding plate and vice versa.

Inventors:
SHIRAISHI, Yutaka (400 Oaza Yokokurashinden, Oyama-sh, Tochigi 58, 〒3238558, JP)
NISHISAKA, Toshihiro (400 Oaza Yokokurashinden, Oyama-sh, Tochigi 58, 〒3238558, JP)
Application Number:
JP2016/075832
Publication Date:
March 08, 2018
Filing Date:
September 02, 2016
Export Citation:
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Assignee:
GIGAPHOTON INC. (400 Oaza Yokokurashinden, Oyama-shi Tochigi, 58, 〒3238558, JP)
International Classes:
H05G2/00; G03F7/20
Attorney, Agent or Firm:
MATSUURA, Kenzo (Matsuura & Associates, P.O. Box 176 Shinjuku Sumitomo Bldg. 23F, 6-1, Nishi-shinjuku 2-chome, Shinjuku-k, Tokyo 23, 〒1630223, JP)
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