Title:
TARGET GENERATION DEVICE AND EUV LIGHT GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/098667
Kind Code:
A1
Abstract:
This target generation device is equipped with: a nozzle 262 including a nozzle hole 263 for ejecting, inside a chamber, a target 27 comprising a molten metal; and a cylindrical member 410 mounted on the nozzle 262 in such a manner as to surround the nozzle hole 263, and having, exposed on at least a portion of the internal wall surface thereof, a substance whereof the standard free energy for generating an oxide is smaller than that of the molten metal.
Inventors:
ISHIHARA TAKANOBU (JP)
Application Number:
PCT/JP2015/084848
Publication Date:
June 15, 2017
Filing Date:
December 11, 2015
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H05G2/00
Foreign References:
| JPS6261761A | 1987-03-18 | |||
| JP2008226462A | 2008-09-25 |
Attorney, Agent or Firm:
MORIMURA Yasuo (JP)
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