TARGET IMAGE-CAPTURE DEVICE AND EXTREME-ULTRAVIOLET-LIGHT GENERATION DEVICE

WIPO Patent Application WO/2016/147255

A1

The present invention addresses the problem of making it possible to improve the stability of operation of an EUV-light generation device. A target image-capture device, which may be provided with: a droplet detector for detecting the passage of a droplet outputted as a target from a target feed unit into a prescribed region in which extreme ultraviolet light is generated, and outputting a detection signal each time the passage of a droplet is detected; an illumination light source for irradiating the droplet detected by the droplet detector with illumination light; an image-capture element for receiving light reflected from the droplet due to the droplet being irradiated with the illumination light, and capturing an image of the droplet; a shutter device that includes a shutter for switching between propagation and cutoff of light, including the light reflected to the image-capture element; and a control unit for outputting an exposure signal for causing the image-capture element to perform image-capture, outputting a shutter opening/closing signal for actuating the shutter so as to open/close upon receiving input of the detection signal while outputting the exposure signal, and causing multiple exposure of the image-capture element to the light reflected from the droplet.

HOSODA HIROKAZU (JP)
YABU TAKAYUKI (JP)
HOSHINO HIDEO (JP)

PCT/JP2015/057502

September 22, 2016

March 13, 2015

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GIGAPHOTON INC (JP)

H05G2/00; H01L21/027

WO2014189055A1

2014-11-27

JP2007109451A	2007-04-26
JP2014175474A	2014-09-22

MATSUURA, Kenzo (JP)
Kenzo Matsuura (JP)

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