Title:
TARGET MATERIAL AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2014/017381
Kind Code:
A1
Abstract:
The present invention provides a target material having a composition formula by atomic ratio of (Fex-CO100-x)100-Y-MY (where M is at least one element selected from Ta and Nb and X and Y satisfy 0 ≤ X ≤ 80 and 10 ≤ Y ≤ 30, respectively), wherein the balance is formed from inevitable impurities and the distortion factor of rupture in bending at 300°C is 0.33% or greater.
Inventors:
SAKAMAKI KOUICHI (JP)
FUKUOKA JUN (JP)
HATA TOMOYUKI (JP)
SAITO KAZUYA (JP)
FUKUOKA JUN (JP)
HATA TOMOYUKI (JP)
SAITO KAZUYA (JP)
Application Number:
PCT/JP2013/069565
Publication Date:
January 30, 2014
Filing Date:
July 18, 2013
Export Citation:
Assignee:
HITACHI METALS LTD (JP)
International Classes:
C23C14/34; B22F3/00; B22F3/14; B22F3/15; C22C1/04; C22C19/07; C22C33/02; C22C38/00; G11B5/851
Domestic Patent References:
| WO2009104509A1 | 2009-08-27 |
Foreign References:
| JP2010018884A | 2010-01-28 | |||
| JP2010280964A | 2010-12-16 | |||
| JP2010024548A | 2010-02-04 | |||
| JP2008260969A | 2008-10-30 | |||
| JP2008189996A | 2008-08-21 | |||
| JP2011159973A | 2011-08-18 |
Attorney, Agent or Firm:
NAKAJIMA, Jun et al. (JP)
Nakajima 淳 (JP)
Nakajima 淳 (JP)
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